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We report the fabrication and broadband actuation of capacitive electrostatic MEMS microspeakers formed by the contact-transfer printing of suspended 125-nm-thick gold membranes over cavities in a 430-nm-thick silicon dioxide (SiO2) spacer layer on a conducting substrate. The membranes deflect repeatedly to produce sound upon electrostatic actuation with a time-varying signal. The microspeaker has...
Using solvent-free composite membrane transfer, we demonstrate an electrically tunable organic visible light-emitting laser with reversible tuning range of 10 nm under 6 V actuation. Large-area scalability of utilized fabrication methods suggests potential use in all-optical pressure-sensing surfaces.
We demonstrate a method for fabricating organic optical microcavities which can be electrostatically actuated to dynamically tune their optical output spectra. Fabrication of an integrated organic micro-opto-electro-mechanical system (MOEMS) cavity is enabled by the solvent-free additive transfer of a composite membrane. Electrical actuation and optical characterization of a completed cavity show...
We report a new method for additive fabrication of thin (125±15 nm thick) gold membranes on patterned silicon dioxide (SiO2) substrates for acoustic MEMS. The deflection of these membranes, suspended over cavities in a SiO2 dielectric layer atop a conducting electrode, can be used to produce sounds or monitor pressure. This process uses a novel technique of dissolving an underlying organic film using...
We report a new method for fabricating thin (140 nm thick) suspended metal films in MEMS. Our MEMS fabrication process employs micro-contact printing. It avoids the use of solvents and etchants, obviating the need for deep reactive-ion etching and other harsh chemical treatments. Solvent absence during fabrication also avoids the deleterious effects of MEMS stiction that can result during wet processing...
A process for rapid fabrication of metallic MEMS (microelectromechanical systems) without lithographic processing is presented. Using dimensionally scalable contact printing, 3D electromechanical structures (see figure) are fabricated and functionally tested. Flexible, paper‐thin device arrays produced by this method may enable such applications as pressure sensing skins for people and vehicles, phased...
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