Search results for: Dietmar Vogel
Microsystem Technologies > 2016 > 22 > 3 > 569-575
Journal of Microelectromechanical Systems > 2007 > 16 > 2 > 365 - 372
Microsystem Technologies > 2016 > 22 > 3 > 569-575
Journal of Microelectromechanical Systems > 2007 > 16 > 2 > 365 - 372