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The introduction of defects during the growth of large lattice mismatched III-V materials typically occurs through the injection of 60deg dislocations from the surface of the film or islands once a critical thickness or size has been reached. The threading segments from these dislocations lead to electrically active states which deteriorate device performance. Strain relaxation at the earliest stages...
This paper presents the fabrication and characteristics of implantable and flexible cuff electrode for neural interfaces using conventional BioMEMS technique. In order to have cuff shape and flexibility of nerve electrode, polyimide was chosen as a substrate material. As electrode materials, platinum and iridium film were deposited with different working pressure of DC magnetron sputter. Electrical...
The nanoindentation experiment is an established technique for the determination of hardness and Young's modulus of thin films. This standard data set is not sufficient to be used as input to finite element simulations , because elastic-plastic material data is being required for analysis of reliability of metal layers. Therefore stress-strain curves are being determined by fitting the force displacement...
One of the main goals of bioelectronics research is to develop an understanding of the interface between biological systems and electronic materials. Toward this goal we investigate the growth of three cell lines that include normal and malignant cells on the conducting polymer poly(3,4-ethylenedioxythiophene) (PEDOT) doped with p-toluenesulfonate (Tosylate, Tos). The results show that electrical...
A novel design for a Dielectric Elastomer (DE) actuator is presented. The actuator is obtained by coupling a conically shaped DE film with a compliant mechanism. The compliant mechanism is designed to suitably modify the force generated by the elastomer film. The resulting actuator provides a nearly constant force along the entire actuator stroke when the DE film is activated and quickly returns to...
Thin-film solid-state rechargeable batteries are ideal power sources for microsystems applications, where a high level of integration is required. The technology and the steps involving the fabrication of such a battery are discussed in this paper. A DC reactive sputtering technique was used in the thin-films depositions. The battery uses SnO2, Li3PO4 and LiCoO2 materials in the anode, electrolyte...
It was shown in the recent experiments that the hybrid organic/inorganic resonant structures could provide a flexible materials platform aimed at the design of novel light emitting devices. The applications of hybrid structures for photovoltaic solar cell can also be useful. We pay attention in this note that the resonant energy transfer in hybrid structure from the organic thin layer to the semiconductor...
Dielectric Elastomer is considered as a kind of promising biomimetic actuator material which behaves similar to human muscle and can produce significantly large strain at high pre-stretch. It generated considerable interests in recent years for use in robotics and mechatronic applications. This paper is mainly on fundamental planar actuation experiment from which we abstract some Voltage-Area deformation...
Some sputtering processes of GaAs and Ti onto glass, c-Si and c-GaAs substrates have been carried out in order to obtain thin films as candidates to be intermediate band photovoltaic materials. This work presents first results concerning the optical and structural properties of the different deposited thin films.
The ultra-small form factor of the electronic components along with a reliable and inexpensive high-density interconnect technology are the key factors in bringing flexible electronics to the next level of miniaturization without compromising performance and substantially increasing production cost. The common thick-film methods used today to fabricate conductive trace patterns on flexible boards...
Silicon Carbide (SiC) is emerging as an enabling material for biomedical microsystems due to its unique combination of electrical, mechanical and chemical properties combined with its compatibility with Si micromachining techniques. This paper presents an overview of the latest advancements in this area including on-going research to develop SiC for biosensing, bio-microdevice packaging, bio-filtering,...
This paper presents a new method using a polymer material to generate optically-induced dielectrophoretic (ODEP) forces for particle manipulation. Instead of using the common material such as amorphous silicon, a polymer (P3HT/PCBM) which has excellent light absorption, was used in this study. Without using delicate and high-temperature thin-film process, the entire fabrication process was performed...
We report on a methodology for simultaneous determination of the Young's modulus and density of ultrathin films from a resonance experiment. The approach is based on an interferometric detection of the in-plane and out-of-plane resonant responses of an optically excited single crystal Si nanocantilever prior and after Atomic Layer Deposition (ALD) of a thin film. The frequencies shifts were measured...
In this paper preparation of BaCuSF thin films by pulsed laser deposition technique is reported. Physical properties of this material that are relevant to the UV sensor application are studied by means of optical spectroscopy and electrical transport measurements. The resistivity response to UV light exposure is investigated and discussed.
Large scale HgTe nanowires have been grown from Te nanowires by solution approach at low temperature. The widths are in the range 10-20 nm, with lengths up to 1mum. The nanowires have been characterized by uv - vis spectra, scanning electron microscopy, energy-disperse X-ray spectroscopy (EDS), transmission electron microscopy. The effects of growth temperature and time have been investigated and...
A micro flow sensor with high temperature coefficient of resistance (TCR) is very important because of its high sensitivity of flow sensors. Different from the conventional positive-TCR Pt film used in micro flow sensor with self-heating, higher negative-TCR micro flow sensor without self-heating is developed and fabricated in this research. The novel TaN-material micro liquid flow sensors are fabricated...
The friction and wear problems have remarkably affected the reliability of Micro-Electro-Mechanical System (MEMS) devices. We present, for the first time, a novel integrated micro-scale closed synthetic-jet-like flow field, which provides a velocity-orientation-constant flow in an enclosure, being available as gas lubrication of the motion parts of MEMS devices to solve the friction problem. Based...
The aim of the study is to evaluate the cell affinity of poly(3-hydroxybutyric acid-co-3-hydroxyvaleric acid) (PHBV) thin films using a parallel plate flow chamber system. The PHBV thin films were modified by anhydrous ammonia gaseous plasma treatment. Mouse 3T3 fibroblast cells were seeded on bare and plasma modified PHBV thin films, respectively. A laminar flow enforces the cells on these films...
The electrical properties of thin film SiNx that has been deposited with PECVD method at 150°C and 250°C are investigated on evaporated and electroplated Au substrates. The aim is to extract the parameters that can be introduced in modeling and simulation tools for MEMS design. The present work provides information on the dielectric charging and its dependence on the film thickness,...
It is found that the blending of inorganic materials and organic materials are usually thermodynamically immiscible with each other. The compatibility between the two blending materials can be enhanced by adding a component which is miscible with both parent materials. Therefore, the as-synthesized silicon dioxide grated by L-lactic acid (OLLA-g-SiO2) was used as a compatibilizer to enhance the compatibility...
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