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According to the characters of CE signal, improved wavelet thresholding with translation invariant was described to denoise for microchip capillary electrophoresis in this paper. The improved thresholding function has muti-derivative compared with the soft thresholding. The denoising method can not only remain the geometrical characteristics and keep the amplitudes of the original electrophoresis...
A vertical-driven resonant micromechanical electrostatic field sensor (EFS) has been firstly developed in this paper. The sensor architecture has three major blocks: a parallel-plate driving electrode, a shielding electrode and a sensing electrode. Unlike other devices, there are many holes in the shielding electrode for modulating the electric field. For improving the signal-to-noise ratio (SNR),...
The configuration of a novel MEMS interdigital transducer (IDT) dual-axis surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing demand for gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and silicon-based MEMS gyroscopes can't meet the demand. Although the MEMS...
Sigma-Delta-Modulators (SDM) are the most successful technique for analog-to-digital (A/D) conversion, especially for high resolution applications. Similar techniques and architectures have been applied to micro-electro-mechanical systems (MEMS) by incorporating a micromachined sensing element in a SDM force-feedback loop. However, compared to the design of purely electrical SDM there are important...
The SGADER (Silicon Glass Anodic-bonding and Deep Etching Release) technology is a well-developed platform for many MEMS devices. An anti-footing aluminum film is a low cost but effective approach to minimize the footing effect in SGADER process, but such Al film cannot be removed completely with normal Al wet etchant after DRIE. In this paper, an optimized etching process for cleaning the anti-footing...
Catalytic combustion gas sensor is influenced by many factors, this paper analyzes theoretically output characteristics, which is helpful for designing and performance evaluation of gas sensor. It bases on sensitivity principles of catalytic combustion gas sensor, deduces the quantitative relation between output and temperature change of sensitive element, and discusses behavioral characteristics...
Electrical impedance spectroscopy is a non-invasive technology for characterizing the dielectric properties of biological tissues and cells. Electrical impedance tomography extends impedance measurements from one dimension to two or three dimensions. Impedance measurements are performed across multiple electrodes, mapping the conductivity distribution within an object. In this paper, electrical impedance...
A new concept of MEMS based thermoelectric power generator (TPG) is investigated in this study. By using solder based wafer bonding technology, we can bond three pieces of wafers to form vacuum packaged TPG. According to the finite element method and analytical modeling results, the output power per area of device is derived as 68.6 muW/cm2 for temperature difference of 6degC between two ends of thermocouple...
A single-mode fiber (SMF) with a microlens on one end is widely used to facilitate laser-to-fiber and/or fiber-to-fiber coupling in optical communication systems. This paper will apply an excimer laser micromachining system and its planetary contour scanning method to fabricate refractive and aspheric microlenses which can be integrated with optical fibers. Two types of fiber lenses are investigated...
The Young's moduli of carbon nanotubes and carbon nanotube thin films (the so called buckypaper) are investigated using nanoscale mechanics and Molecular Dynamic (MD) simulation methods. The results show that the Young's modulus of single walled (10, 10) carbon nanotubes ranges from 0.75 TPa to 0.9 TPa, which agrees well with some published data in the literature. For single layer buckypapers of single-walled...
In this paper, we present two designs for developing a biocompatible affinity MEMS glucose sensor. Based on these designs, two devices were fabricated and characterized. These devices, consisting of a micro-cantilever or membrane situated inside microchambers, are driven by a remote magnetic field and separated from the sensing environment by a semi-permeable membrane. A change in viscosity induced...
This paper presents a new roller-based nano-imprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for pattern transferring. Another metal film which acts as an adhesion layer is also deposited on the substrate surface. An infrared light source incident from the substrate side heats up the metal films. After imprinting,...
We developed reaction chamber arrays with a volume of a few femtoliters to monitor biological reactions at single-molecule level. Micro-meter holes were fabricated on the surface of a silicone elastic sheet (PDMS). Sample solutions were sandwiched between the fabricated sheet and a glass surface. Resultantly, solutions were enclosed in each chamber hermetically. The uniformly shaped chambers allow...
Nanodiamond materials can be engineered for a broad range of applications in medicine. This presentation will highlight the relevance of these materials as foundations for device fabrication across the spectrum of biology and technology. We have applied diamond-based nanomaterials toward controlled and localized drug delivery for applications in anti-inflammation to protect against implant rejection,...
The study presents a novel microfluidic mixing scheme in which the fluid streams are mixed via the applications of harmonic and chaotic electric potentials to four electrodes mounted on the upper and lower surfaces of the mixing chamber. Numerical simulations are performed to analyze the effects of the resulting harmonic oscillating and chaotic oscillating electrokinetic perturbation forces. The harmonic...
In order to improve the matching performance of the nMOSFET and pMOSFET threshold voltages in CMOS circuit, a novel p+ poly-SiGe gate CMOS device is described in this paper. With the change in work function and bandgap, the device effectively reduces the threshold voltage Vth of pMOSFET while the performance of nMOSFET is maintained. Moreover, the threshold voltage Vth of pMOSFET can be continuously...
A novel method to apply thin metal film for preventing footing effect in making micro-mechanical structure on SOI wafer is presented. The handle wafer of the SOI wafer was etched to form cavity by KOH solution, and followed by removing the buried oxide from backside. Then a thin aluminum film was sputtered in the cavity to prevent footing effect. The experimental results showed that the SOI micro-mechanical...
We introduce a novel fabrication method of a tungsten tip for STM applications. It uses a gradual meniscus descending phenomena caused by the thanks of a Teflon structure with the hydrophobicity. The fabricated tungsten tips with high aspect ratio have curvature radius of 20 nm or even less. Good reproducibility is experimentally demonstrated by the use of the new etching system. Finally, field emission...
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