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Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was microfabricated for precise bio-marker detection.
The present article reports on experimental measurements aimed at assessing general theoretical expressions of temperature coefficients in the case of crystalline silicon solar cells. The relevance of a recently proposed relation between the temperature dependence of open circuit voltage and the external radiative efficiency of photovoltaic devices is demonstrated. Unusual temperature sensitivities...
The non-destructive displaying defects of luminescence imaging is presented for inspecting silicon solar cell characterization of photovoltaic panel. The displaying system with photoluminescence can be applied to cleaning robotic device for tracing panel defects after cleaning photovoltaic panel arrays. A comparison method of the photoluminescence images with various illuminations has high sensitivity...
The static response of microelectronic capacitive pressure sensors with a fine silicon rectangular membrane or square membrane is studied in the low distortion limit. The response represented by the variation of the capacity with the pressure, presents two parts: a nearly linear part corresponding to values of PN lower than 0,6 (unity) and second highly non linear part for PN higher than 0,6(unity)...
A technique which retains wafer-scale processing and packaging compatibility is described for customizing the dynamics of individual silicon resonators. The approach uses laser ablation of a protective conformal layer (parylene) to expose silicon in regions that are targeted for mass removal by subsequent DRIE. The technique is demonstrated on a planar axisymmetric resonator design whereby the frequency...
A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum...
In this study, a novel tactile sensor with detection abilities of human body hardness and frictional force is reported. A new device configuration of back-side contact is proposed to realize a higher sensitivity of hardness, and low sensitivity to normal force. Miniaturization and sensitivity improvement of tactile sensor are important to apply the sensor to palpation inside of the body. Surface frictional...
This paper reports the first three-dimensional (3D) Hall sensor with isotropic sensitivity for the three spatial components of the magnetic field. The silicon device has the shape of a hexagonal prism with symmetric sets of three contacts on its top and bottom surfaces. Sending currents obliquely across the device allows one to operate it as three mutually crossing, identical, and effectively orthogonal...
This paper presents the Modeling of Silicon capacitive pressure sensor for biomédical applications. Using the Micro Electro Mechanical Systems (MEMS) technology, MEMS sensors are widely used in biomédical applications due to its advantages of miniaturization, low power consumption, easy to measurement and telemetry. This work demonstrates the design of MEMS based capacitive pressure sensor using finite...
In the present paper, the design and simulation of square diaphragm, MEMS piezoresistive pressure sensor for intracranial application has been presented. The pressure sensor design presented in this paper consists of a carbon nanotube (CNT) suspended on a square and slotted shaped diaphragm as piezoresistor. The slot was added into the design of the square diaphragm to reduce the residual stress and...
In this paper, we report the potential of the doping-less (DL) double gate field effect transistor (DL-DGFET), for ultra low power (ULP) subthreshold logic applications. We demonstrated that the proposed DL-DGFET do not require any doping from source to drain region and it can perform significantly better than highly doped junctionless (JL) and abrupt S/D inversion-mode (IM) DGFETs. The DL-DGFET achieves...
The paper presents research made using acquisition system designed and built by the authors. It consists of Silicon Photomultipliers used for fluorescence light detection, integrated circuit dedicated for Silicon Photomultipliers and FPGA board for data acquisition. Moreover, electronic part of the system is integrated with optical section i.e. semiconductor laser, optical filters, microflow structure...
This paper introduces the Hard Soft Acid Base (HSAB) concept as a promising tool for the selection of gas sensing layers. Target gas molecule — sensitive layer tandems are discussed and interpreted in the terms of this theory. Sensing layers suitable for carbon dioxide, nitrogen dioxide, sulphur dioxide, and hydrogen sulphide detection are presented and classified according to this concept. For oxygen...
In this work we present an extensive investigation of the behaviour of a pH sensor fabricated according to an extended gate configuration by exploiting the superior sensing properties of a zinc oxide nanostructured membrane (ZnO nanowalls) and the high performing capabilities of a polysilicon thin film transistor integrated directly onto an ultra-flexible polyimide substrate. The sensor response is...
In this paper, the design and fabrication techniques of a differential pressure sensor used in precision air data module (ADM) are described, and its performance test results are presented. A differential pressure senor for an ADM detects the differential pressure between static and total pressure, which can cover differential pressure of 0~20psi range with less than 1% accuracy. In order to satisfy...
The present work analyzes a four-terminal Hall-plate device to determine the main sources of error and explain how current-spinning technique can be used to effectively reduce offset and noise. Based on this analysis, an improved magnetic sensor is designed using an eight terminal octagonal Hall plate and a chopped-based control circuit to implement the current-spinning technique. Since Hall plates...
This paper presents brief study of MEMS technology and development of condenser microphone with no holes in back plate. In general silicon materials are used in MEMs. MEMS devices can be fabricated by using bulk micromachining and surface micromachining. Microphone is designed by using a thin silicon crystalline material as flexible diaphragm and gold material as back plate. The aim of this paper...
Online security early warning and preventive control are important parts of self-healing for smart distribution system. The structure of security early warning and preventive control are presented in this paper. Preventive control is equivalent to a multi-stages decision problem, which is divided into three stages: regulation of output for distributed generators and reactive power compensation device,...
A compact fabrication tolerant MZI filter is demonstrated. The measured device shows a 20-fold improved tolerance to systematic waveguide linewidth variations, with a wavelength shift of less than 60 pm/nm linewidth change.
The pH sensing response of the alternating current (AC) on the source/drain was investigated on lithographically defined Si NGFETs which were modified with APDMES. The sensors were measured under different frequency and the sensitivity was improved (∼ 2 to 8 times) in a frequency range from 100Hz to 100KHz, with the maximum of improvement around the cut-off frequency.
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