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Through silicon vias (TSVs) are arranged to form a rectangular resonant cavity to improve performance of silicon based antenna in this paper. On the basis of fundamental theory of rectangular resonant cavity, the model of cavity made of through silicon vias is analyzed. Considering the size of millimeter-wave antenna, the three dimensions of cavity for mode TE101 is calculated. Applying the resonant...
In this work we present a methodology to post-process a large array of a few hundred nanometer thin photonic membranes that were fabricated using complementary metal-oxide-semiconductor (CMOS) technological platform. The post processing results in local removal of the silicon substrate and of the buried oxide (BOX), which provides a free access from both side of the photonic structures. The membranes...
Design a component structure of an SOI microneic resonator. It is a waveguide with a width of 450 nm and a height of 220 nm. The light is in the range of 2.5 μm. It surrounds its waveguide with SiO2. In order to make the ring resonant cavity meet the phase matching conditions. The element uses a ring-to-waveguide coupling zone and adjusts the coupling parameters by changing the coupling pitch. In...
The RF performance of advanced silicon technologies has enabled the development of highly integrated wireless System on Chip (SoC) from 60 GHz up to the sub-THz spectrum. Leveraging wide bandwidths available at sub-THz frequency, data rates above 10 Gb/s have already been demonstrated. However, in order to develop highly integrated and cost effective silicon-based sub-THz wireless SoC we also have...
The detection of phenylacetone is of interest as it is a common precursor for the synthesis of (meth)amphetamine. Resonant gravimetric sensors can be used to detect the mass and hereby the concentration of a gas while colorimetric arrays typically have an exceptional selectivity to the target analyte if the right colorimetric dyes are chosen. We present a sensor system consisting of a Capacitive Micromachined...
We design a T-shape structure reflecting mirror covered a gold thin film on the high-resistivity silicon substrate (ρ=1000 Ω·Cm) for the detector array. The electric field distribution of the T-shape structure is simulated by using finite difference time domain (FDTD) solutions in the frequency range from 300 GHz to 400 GHz. The electric field can be gathered in the central area of the silicon substrate...
We demonstrate for the first time that InAlAs/InGaAs QW can be selectively grown on micron-sized InP-OI substrates, obtained by selective epitaxy in empty oxide cavities on Si. The concept, material and optical characterizations are presented, paving the way towards integrated light sources for infrared applications.
We experimentally demonstrate a novel method to make a tunable Fano resonance. Based on a silicon microring with two tunable reflectors inside, we are able to generate a tunable Fano resonance with maximum extinction ratio over 40 dB and a slope rate over 700dB/nm.
We present the concept and design of a hybrid integrated widely tunable III-V-on-silicon ring laser with 80 nm tuning range by means of theoretical investigation. Laser spontaneous emission is provided by two gain chips, one for the C band and the other for the L band. Gain chip sections are duplexed into the silicon photonic passive cavity using a lattice filter. Wavelength tunability is proposed...
A back-side grinding CMOS-MEMS process is well established for thinning wafers down to tens of micrometres for use in stacking chips. As a result of the mechanical process, the wafer backside is compressively stressed. In this paper, authors investigate the influence of the backside induced stress in MEMS/CMOS wafers thinned down to 35∼275 μm by means of a micro-Raman technique. We found that the...
MEMS atomic vapor cells have a large variety of applications in atomic devices such as chip-scale atomic clocks (CSACs), atomic magnetometers and atomic gyroscopes. We report here on the successful wafer-level hermetic sealing of such cells by Cu-Cu thermocompression bonding. This innovative method is used as an alternative to anodic bonding and allows to overcome some of its limitations. In particular,...
We present the development of an ultra-stable laser based on a Fabry-Perot cavity made from single crystal silicon. This cavity is cooled down to 17 K to reach a nulling of the thermal expansion. Thanks to the high mechanical quality factor of silicon and to the low temperature, the expected thermal noise limited fractional frequency instability is 3 × 10−17.
Hybrid halide perovskite has made great advances for making new composition of materials, which have wide usage in advanced optoelectronic devices. Here we show amplified spontaneous emission (ASE) in a perovskite nanograting metasurface, defined by the cost effective nanoimprint lithography method which cannot typically be applied to hard, ionic based materials such as perovskite.
Organic-inorganic hybrid perovskites have recently emerged as promising materials for optoelectronics. Here we show successful patterning of hybrid perovskite into nanostructures with cost-effective nanoimprint technology. Photodetectors are fabricated on nanoimprinted perovskite with improved responsivity. Nanoimprinted perovskite metasurface forms with significantly enhanced photoluminescence. Lasing...
In this paper, a two-dimensional photonic crystal based tunable optical filter having Si rods with different shape cavities, as H-shape, square and circular is designed and investigated. The shape of Si rods is also changed from circular to square and the shift in resonating frequency of filter is achieved. The area of each cavity has been kept constant for achieving the result. The filter is designed...
We propose in this work an original nanobeam cavity geometry for the hybrid integration of active materials in silicon photonics. The key point of this structure is to use Bragg mirrors exploiting a dielectric dispersion band, to form a field-confining cavity core relying on an air dispersion band. The resulting situation opens the way for a gentle confinement of the electromagnetic field in the low-index...
We report on the realization of high-Q/V silicon photonic crystal cavities with resonance wavelengths in the telecom window around 1.55 µm. The cavity designs are based on an effective Aubry-Andrè-Harper bichromatic potential, defined by the superposition of two one-dimensional lattices with an incommensurate ratio between their periodicity constants. This peculiar confinement mechanism allows to...
A promising design for novel mid-infrared integrated Fabry-Perot cavities based on Bragg grating is presented. These cavities show good potential for several applications, including sensing, optical metrology, thermal imaging or free-space communications.
Stable and spectrally narrow laser sources referenced to ultrastable passive Fabry-Pérot cavities are invaluable for optical atomic clocks and they find important applications, e.g. in precision tests of relativity or novel radar applications. Ultimately the fractional frequency instability of the laser is limited by Brownian thermal noise of the cavity constituents.
Nonlinear wavelength generations by using the optical waveguides are more compact, low cost, and efficient than using the traditional solid state systems [1], and the generated broadband light sources can be utilized in optical coherence tomography, frequency metrology, optical communications, and many other. In this work, the high quality of tantalum pentoxide (Ta2O5) micro-ring resonator has been...
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