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This paper presents MEMS multi-sensors with low power tunable-gain interface circuit that can be monolithically integrated in the ASIC compatible standard CMOS process. A high gain ultra-low power sustaining TIA amplifier circuit with PLL compactly has been integrated with the resonator-based core sensing structure. The proposed low-power readout circuit adopts Correlated Double Sampling (CDS) to...
This paper focuses on two approaches for designing of resonator of MEMS sensors. The first approach is the calculating of the quality factor and fundamental frequency of four types of resonators, which result from thermoelastic damping. And the second approach is the computing of the frequency changes of these four resonators, which are due to residual stress. In this article, the fourth type of the...
In this paper, a novel approach for the determination of densities and viscosities of fluids, using a multi-mode MEMS resonator, is introduced. A self-actuating/self-sensing piezoelectric MEMS-resonator is design in operated in a distinct way, so that lateral as well as transversal bending modes can be excited within one measurement cycle. This enables a unique evaluation principle based on a two-step...
We report on a new design approach for X-Y symmetric resonator, that can be mechanized as rate (RG) or rate-integrating gyroscope (RIG), with a single digit as-fabricated frequency split between the two mechanical out-of-phase operational modes. We explore concentration of critical mechanical elements (shuttle-spring-anchor modules) close to the center of the die to mitigate the effect of the fabrication...
In this work, a 1.2-MHz CMOS-MEMS DETF (double-ended tuning fork) resonator with its on-chip tunable transimpedance amplifier (TIA) is designed to measure the ring-down response of the resonator circuit for pressure sensing applications. From the time-domain ring-down waveform, the frequency and quality factor of the resonator circuit can be extracted corresponding to its environmental pressure. Due...
This paper presents the in-run bias stability of a high Q-factor Quad Mass Gyroscope (QMG), vacuum sealed with getter activated in Leadless Chip Carrier (LCC) package. Quality factors of 1.2 and 1.1 Million were measured along the layout-defined drive and sense modes. As-fabricated, frequency mismatch of 35Hz was electrostatically tuned to 200mHz, for a device with 2kHz center frequency. A performance...
This paper reports on the development of a micromechanical vibrating mass tuning fork gyroscope with coupled drive and sense modes. The mechanical structure has been designed to have a first anti-phase drive mode and a second anti-phase sense mode. The frequencies of all other modal modes are higher. The micromechanical structure is fabricated with a cavity SOI technology called BDRIE [1]. The analog...
This paper presents a method to calculate the air damping coefficient and the quality factor value in MEMS gyroscope at different cavity pressures. Taking the structure of MEMS gyroscope as an example, firstly, the authors derived the simplified M-C-K dynamic model. Then, the elements of mass matrix and stiffness matrix were calculated based on certain assumptions, especially the air damping coefficient...
We report detailed characterization of a vacuum sealed angle measuring silicon MEMS gyroscope. The new gyroscope utilizes completely symmetric, dynamically balanced quadruple mass architecture, which provides a unique combination of maximized quality (Q) factors and isotropy of both the resonant frequency and the damping. The vacuum sealed SOI prototype with a 2 kHz operational frequency demonstrated...
The paper presented a novel MEMS (Microelectro-mechanicalsystems) electric field sensor (EFS) based on SOI (Silicon on Insulator) fabrication process for detecting internal defect of non-ceramic (composite) insulators. The ability to measure both AC and DC electric field is a significant advantage of this sensor in comparison to other sensors, which can only measure either AC or DC electric field...
The aim of this work is to establish design principles and model equations for analysing sensitivity of MEMS cantilever sensors. Sensitivity and quality factor were estimated to be the most important parameters for MEMS cantilever sensors.
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