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System sensitivity analysis (SSA) is a mathematical method used in the study of behaviour of dynamic systems. From engineering practice is well known that a dynamic system did not respond in the same way to all external stimulus (command or disturbance). The results of SSA study for anaerobic digestion bioprocess, provides important information for synthesis of control system. Also, it is possible...
This paper reports a tiny-sized (140μm×140μm) p-Si/Al infrared (IR) thermopile, which is low-cost bulk-micromachined only from the front-side of (111) wafer for IC-foundry compatible manufacturing. With the novel single-side bulk-micromachined structure, the tiny-size MEMS thermopile consists of six single-crystalline (SC) Si/Al thermocouples that show significantly higher Seebeck-coefficient and...
We have investigated the performance of proposed multi-slot stack-type ring resonators. For biosensors, the sensitivity is roughly proportional to the number of slots. For optical modulators, the low operation voltage < 0.4 V is simulated.
This paper describes the new design and material selection used to improve the sensitivity of ionizing radiation sensing with a zinc oxide based Film Bulk Acoustic-Wave Resonator (FBAR). Prior results [1] demonstrated that the parallel resonant frequency of the FBAR decreased after irradiation due to radiation-induced charge trapping in the SiN. Here, by employing Plasma Enhanced Chemical Vapor Deposited...
Reported is a surface-micromachined piezoresistive composite sensor, with both pressure sensor and accelerometer integrated in a 1.6mm×1.6mm chip for low-cost automobile tire-pressure monitor system (TPMS) application [1]. The two sensors are fabricated with compatible surface-micromachining process. Using a LIGA like process, a Cu thick-layer is electroplated and patterned on the accelerometer mass...
Epitaxial graphene grown on SiC substrate is one of the most promising methods for achieving large area uniform graphene films. Our experimental results demonstrate graphene layers grown on both Si and C-faces of semi-insulating 6H-SiC can offer very high detection sensitivity, selectivity, and fast response time. Exposure to only 500 ppb NO2 reduced the conductivity by 2.25%, while 18 ppm caused...
In situ SiO2-doped SnO2 thin films have been prepared by liquid phase deposition method. The effect of SiO2 additive on the surface morphology and crystalline structural of the thin films were investigated by grazing incident angle X-ray diffraction (GIAXRD) and scanning electron microscopy (SEM). In the characteristics of sensing response, the SiO2-doped CuO Au-SnO2 gas sensors (Si/Sn = 0.25 and...
A type of NEMS double Si3N4 resonant beams pressure sensor is presented in this paper. The maths models are established in allusion to the Si3N4 resonant beams and pressure sensitive diaphragm. Based on the maths model of Si3N4 resonant beams, the relation between the resonant frequency and key dimensions of Si3N4 resonant beams is analyzed. Based on the maths model of pressure sensitive diaphragm,...
This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600??C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The...
We successfully prepared the surface photovoltage sensor system using several types of modified mesoporous silica as a sensitive materials. The sensitive materials were fabricated using self-ordered and structure-controlled modified mesoporous thin films, which is synthesized by a molecule surfactant method using spin coating. The surface photo voltage sensor was characterized for the dangerous gas...
Sensitivity of piezoelectric ultrasonic microsensors has been enhanced through static deflection control on silicon dioxide diaphragm structures. A precise deflection control process has been developed for fragile SiO2 diaphragms derived from a both-side oxidized normal silicon wafer. The diaphragms have been re-buckled upward without breaking and the sensitivity has been improved by four times on...
Piezoelectric ultrasonic microsensors have been fabricated using sol-gel derived PZT (Pb(Zr,Ti)O3) thin films on micromachined silicon dioxide diaphragms made from a normal silicon wafer instead of the conventional SOI (silicon on insulator) wafer process. The layered structure of the PZT capacitor part on the diaphragm has been modified in order to control the total lateral stress in the diaphragm...
The paper presents a novel single-side micromachined composite sensor, with a piezoresistive pressure sensor, a thermal-convection accelerometer and a thermometer monolithically integrated in one 2.5times2.5 mm2 chip, for low-cost production and applications such as tire-pressure monitoring systems (TPMS). The accelerometer is based on heat convection, including a micro heater and two pairs of micro...
This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40 mV/degC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating...
The temperature dependence of device performance is a critical factor that determines overall product power-performance. We show HKMG gate stacks drive significantly higher threshold temperature dependence over poly-Si/SiON. We further show that in SOI, the work-function engineering enabled by HKMG integration schemes can result in even higher Vt temperature sensitivity attributed to differences in...
This paper uses finite element method to obtain the optimal performance of piezoresistive microcantilever sensor by optimizing the geometrical dimension of both cantilever and piezoresistor. A 250 mum times 100 mum times 1 mum SiO2 cantilever integrated with 0.2 mum thick Si piezoresistor was used in this study. The sensor performance was measured on the basis of displacement sensitivity and surface...
This innovative pH-ISFET sensor used nanocrystalline-AlN thin film as ion-sensitive membrane which prepared by reactive gas-timing r.f. magnetron sputtering without heating substrate and post annealing. The technique of gas-timing r.f. magnetron sputtering purposed by us, the feeding gas is on-off controlled periodically in such a way that the deposited AlOxNy film has a quite stable composition of...
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