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In this paper, we present a capacitive, MEMS based accelerometer comprising an ultra-low noise CMOS integrated readout-IC and a high precision bulk micro machined sensing element. The resulting accelerometer reaches an acceleration equivalent noise of only 200 ng/fHz, which makes it suitable for seismic measurement that require noise levels significantly below 1 pgAjHz. The design of the sensing element...
In this paper a measurement setup is presented that enables automatic characterization of silicon piezoresistive MEMS pressure sensors. It is used for determination of the pressure and temperature dependences of sensor electrical parameters. Some of the equipment in the setup, and the software application that controls the process, are developed at the Center of Microelectronic Technologies (CMT)...
In this paper we present the first CMOS MEMS thermoelectronic multidirectional flow sensor. We also introduce a Constant Temperature circuit based on diode thermal feedback and calibrate the sensor for 2D multidirectional wall shear stress measurements up to 2 Pa. The sensor electro-thermal transduction efficiency is 115 pW/°C. Average sensitivity is 250 mV/Pa at 225 °C operating temperature (Vd=0...
MEMS (mico-electro-mechanical systems) accelerometers must meet rigorous performance requirements for future applications like indoor navigation. To further improve the sensors performance new effects like radiometric forces have to be considered. Small temperature gradients within the sensor package caused by outer or inner heat sources will cause noncontinuum gas flows inside the sensor leading...
This paper proposes a novel method to acquire MEMS resonator's temperature based on the measurement of quality factor via continuous ring-down without additional thermometer. Quality factor, a parameter of resonator is utilized as a virtual thermometer, which attenuates measuring hysteresis and improves the performance of temperature compensation. In addition, to precisely measure the quality factor,...
Heat transfer phenomena in electronic nanostructures are supposed not to obey the classic Fourier heat transfer theory. Thus, in order to verify this hypothesis experimentally, a set of MEMS nanostructures was designed and manufactured. These structures contain a number of cavities filled with different materials, including various dielectrics, such as silicon dioxide and the silicon nitride, or air...
MEMS barometers are often addressed for vertical position detection in navigation systems because of the relatively high accuracy of measurement. This paper presents results of the assessment of two (contemporary) commercial barometric pressure sensors in indoor and outdoor (barometric) altitude measurements. A comparison of the acquired pressure data derived simultaneously from two pairs of sensors...
SAFRAN COLIBRYS introduce the MS1000 accelerometer, a new class of high performance MEMS accelerometer specially designed for inertial applications. It is based on Colibrys' long experience with MEMS technology and introduces an innovative design solution to meet tactical grade requirements. This paper introduces the MS1000 architecture, reviews in detail the key performances of the product, and presents...
Sensonor has since 2009 produced tactical-grade MEMS-based IMUs and gyro-modules. During this time, approximately 20,000 parts, containing 60,000 MEMS gyros, have been shipped. Prior to this, Sensonor has been the supplier of high-reliable MEMS sensors, including gyros, to demanding safety applications in the automotive industry for more than 20 years. This paper will focus on the MEMS gyros and present...
A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%.
This paper presents the results of the ESA funded C-MAC activity, started mid-2015 and currently in the assembly and testing phase. The objective of the activity is to develop an innovative and low-cost ceramic-based physics package (PP) for ultra-low power miniature atomic clocks (MACs) with flat form factor for future portable devices (GNSS receiver, smartphone, tablet, laptop, etc.) and high-end...
We propose a frequency drift detection method for coherent population trapping (CPT) atomic clocks to improve their long-term frequency stability. One of the main reasons for frequency drift in gas-cell based atomic clocks is buffer gas pressure variations in the gas cells caused by leakage through the cell walls. In this work, the drift detection method is demonstrated experimentally using a dual...
We report on a 32-MHz quartz TCXO fully integrated with commercial CMOS electronics and vacuum packaged at wafer level using a low-temperature MEMS-after quartz process. The novel quartz resonator design provides for stress isolation from the CMOS substrate thereby yielding classical AT-cut f/T profiles and low hysteresis which can be compensated to < ± 0.2 ppm over temperature using on-chip third-order...
A practical application of multi-physics simulations was presented. In order to analyse thermal stability of MEMS micro scanner, multi-physics simulation procedure was proposed and then verified by comparing the simulated results to the measured data. The proposed procedure started from defining simulation parameters and was verified stepwise by comparing the interim results with the related experimental...
The paper represents an innovative miniature 9DoF IMU system based on MEMS digital output inertial sensors which may read the linear and angular rate accelerations and the magnetic field at all three axes, the temperature up and down of the board by integrated analog and digital sensors and transmits the measured data by Bluetooth or GPRS link to the remote servers or devices. The integrated Bluetooth...
Micro-machined (MEMS) gyroscope is widely used in various control situations. How to improve the precision of MEMS gyroscope is a problem worthy to study. Based on the sensor array technology, the gyros array structure and auxiliary circuit module are designed. The hardware structure of the virtual gyro is tested and analyzed. The accurate output of gyro is obtained through the temperature compensation...
This paper presents a real-time temperature compensation algorithm for a force-rebalanced MEMS capacitive accelerometer which relies on the linear relationship between the temperature and its dynamical resonant frequency. A phase-locked loop (PLL), where we inject a drive signal to excite the accelerometer into resonance and track the real-time resonant frequency, is added to the conventional force-rebalanced...
In this work, a simple and cost effective MEMS based gas sensor incorporating with WO3 nanoparticle is presented of the measurement nitric oxide on ppb level. The WO3 NPs synthesis, it was deposited on Pt/Ni/SiNx/SiO2/Silicon substrate by HWCVD with thermal furnace annealing process. The sample characterized was using SEM, XRD, EDS; The electrical measurements for transient resistance by keithley...
The proposed MEMS-technology viscosity sensor solves two major drawbacks associated with current state of the art MEMS viscosity sensors, such as: (1) Functional complexity and integration of external components for actuation and subsequent data acquisition; (2) Fabrication incompatibilities with CMOS processes. The proposed solution is based on thermally induced actuation, subsequent vibrations of...
This paper reports on zero-rate noise contributions in a closed-loop MEMS vibratory gyroscope. In particular, we are investigating sources and composition of bias instability noise. This 1/f-noise is the dominant error component when integrating the angular rate for durations on the order of one minute. It is demonstrated that mechanical quadrature is not responsible for the bulk of bias instability...
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