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A planar implementation of groove gap waveguide is presented at Ka-band. The new structure has similar modal characteristics to air-filled machined groove gap waveguide, but in a low-cost fabrication technology that may be readily integrated with surface mount components. The structure provides two DC isolated conducting planes while still providing a low-loss planar transmission medium. A coplanar...
This work reports on RF MEMS chip capping to protect sensitive devices by quartz caps having a cavity to enclose MEMS devices and an epoxy dry film polymer as a sealing ring. The fabrication process for both die-to-die and wafer-to-wafer 0-level capping is presented. Good adhesion of caps to the substrate is demonstrated by shear tests, while RF measurements on CPW lines indicate a negligible insertion...
CPW-fed CBFSAs designed at 4.5 GHz is proposed in this paper. From simulation and fabrication results, it was found that the CBFSA which used a shallow cavity (λo/40≈λd/22) is able to focus the radiation pattern on one side of the substrate and gain of 4.28 dB is obtained. This CBFSA with a shallow cavity may find applications where uni-directionality and limited size in designs are required.
This paper will describe methods developed to enhance the effective integration of complex systems. A variety of integration techniques will be described for coplanar waveguide based architectures used for in-plane and three-dimensional wafer scale packaging. Each approach offers low loss and low dispersion characteristics from DC to V-band and in special cases W-band.
This paper is focussed on the miniaturization and characterization of semi-lumped resonators, of interest for the synthesis of metamaterial-based structures such as metamaterial transmission lines, frequency selective surfaces, absorbers, and radiating elements, among others. The particles consist on metallic patterns etched on a dielectric and are inspired on the split ring resonator, SRR (that is,...
This paper reports on a 60 GHz common base fundamental oscillator with ultra low phase noise realized in QUBIC4Xpsilas HBT technology. It uses a silicon micromachined cavity resonator which is mounted on a common MCM PASSI3I carrier and coupled to the MMIC. A novel feed approach is presented which uses a wirebond to couple the interconnecting CPW line to the KOH-etched silicon cavity of which the...
This paper presents a novel surface micromachined low-loss integrated cavity filter with a pair of transmission zeros using a simple source-load coupling scheme for emerging 60 GHz applications. The proposed method eliminates the dielectric loss by elevating the cavity-based filter into the air with the aid of the polymer-core conductor surface micromachining technology. The electrical fields of the...
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