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A piezoelectric MEMS with wake up function, Power down interrupt generator (PDIG), for inertial sensor systems is reported. The aluminum nitride based MEMS generates electric signals intrinsically in result of an inertial accelerations. The PDIG is optimized for maximum charge and voltage sensitivity. The charge sensitivity for a single electrode designed PDIG is measured with 40.1 pC/g and the maximum...
This paper presents the Modeling of Silicon capacitive pressure sensor for biomédical applications. Using the Micro Electro Mechanical Systems (MEMS) technology, MEMS sensors are widely used in biomédical applications due to its advantages of miniaturization, low power consumption, easy to measurement and telemetry. This work demonstrates the design of MEMS based capacitive pressure sensor using finite...
This paper reports a capacitive pressure sensor. Like a common capacitor, it consists of three parts: the top electrode, the dielectric layer and the bottom electrode. The dielectric layer consists of the silicon oxide and an air gap. The fabrication process of this structure combines the CMOS process with the post-CMOS MEMS process. The bottom electrode made of polysilicon is formed during the CMOS...
This study reports the design and implementation of a novel micromachined microphone. The design of the microphone is based on the well-known two-poly processes. The design as shown in Fig.1 has four merits, (1) rigid-diaphragm formed by the rib-reinforced poly-Si as acoustic wave receiver and moving-electrodes, (2) flexible-spring formed by thin poly-Si as diaphragm supporter, (3) rigid-diaphragm...
A novel method to apply thin metal film for preventing footing effect in making micro-mechanical structure on SOI wafer is presented. The handle wafer of the SOI wafer was etched to form cavity by KOH solution, and followed by removing the buried oxide from backside. Then a thin aluminum film was sputtered in the cavity to prevent footing effect. The experimental results showed that the SOI micro-mechanical...
In summary, this study successfully demonstrates the design and implementation of high performance CMOS condenser microphones. Microphone with a flat frequency response between 100 Hz~20 KHz have been fabricated in a reproducible way. The interlace slots structure not only reduce the intrinsic stress of diaphragm also changing the stiffness of diaphragm and shrink the size of membrane. The major advantage...
This paper reports a monolithically integrated CMOS-MEMS three-axis capacitive accelerometer with a single proof mass. An improved DRIE post-CMOS MEMS process has been developed, which provides robust single-crystal silicon (SCS) structures in all three axes and greatly reduces undercut of comb fingers. The sensing electrodes are also composed of the thick SCS layer, resulting in high resolution and...
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