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Point-of-Care (PoC) diagnostic devices, such as lateral flow tests, are often used in low and middle-income countries (LMIC) for low-cost disease detection. Most commercial lateral flow tests use colorimetric detection on a nitrocellulose substrate. In this paper, we present a multistep, fluorescence-based assay detection system, which can detect antibodies in plasma to recombinant protein. Fluorescence-based...
This study reports a magnetic-bead based microfluidic system to capture cholangiocarcinoma cells by using structurally well-defined heparan sulfate (HS) octasaccharides. Ten synthetic HS octasaccharides (from SCH-43 to SCH-52) were coated on magnetic beads for this study, respectively. An integrated microfluidic system equipped with micromixers, normally-closed valves, and microchambers was developed...
We report a type of MEMS-technique processable micro-supercapacitors built on 3D graphene nanowall (GNW)/Ni core-shell electrodes. While the growth of GNW on quartz glass and other conductive substrates were rationally revealed, the microfabrication of hybrid electrodes was realized by uniformly coating Ni on GNW to simultaneously serve as a shadow mask for patterning and an active material for capacitance...
Due to the demand of consumer electronics products for portable and multi-function, the development of microelectronic packaging forced to reduce the size and costs, to raise high performance. The trend causes the traditional wafer level packaging (WLP) integration great challenges: (1) when the chip size continued to scaling and solder balls became large for back-end package; it does not fit it inside...
A plasma flood gun (PFG) has been developed for Nissin implanter "iG5 [1]" and "iG6" for Gen. 5.5 and 6.0 flat panel display (FPD) process. The PFG with a filament cathode can supply high electron flux in order to neutralize the surface charge of glass substrate irradiated by the high current ion beam [2]. We investigated the charge-up of the target glass substrates irradiated...
Photoluminescence properties of gallium nitride-based thin films directly grown on an amorphous quartz glass substrate are investigated. The films are grown by a molecular beam epitaxy apparatus having dual radio-frequency nitrogen plasma cells. Effects of impurity doping, and/or a small amount of indium incorporation by simultaneous operation of the dual nitrogen plasma cells on the photoluminescence...
We propose a simple yet effective method for the display based on vapor condensation on the hydrophilic/hydrophobic patterned surfaces. It was found that supersaturated water vapor first formed nanometer-sized water droplet on the condensation nuclei on the patterned surfaces, then the water droplet grew bigger and therefore scatter more light to visualize the outline of the patterns for naked eyes...
CdTe solar cell devices are a promising technology, but they still have room for improvement before the theoretical efficiency of 30% is reached. In this study, we fabricate CdTe devices using close space sublimation to deposit CdTe and chemical bath deposition for the CdS layer. We explore the effects of oxygen plasma treatment on both the F-doped SnO2 (FTO) layer of commercial glass substrates and...
In this paper, we report the fabrication process of Through Glass Via (TGV) structure and basic design rules for glass based Three-Dimensional Integrated Circuit (3D-IC) packaging as well as a process flow for glass interposer applications. Quartz glass materials have been widely used in many packaging applications for micro electromechanical systems (MEMS), optical devices, and biomedical chips....
A recent trend in biosensors and biomedical devices is the fabrication of compact, high aspect ratio and free-standing biocompatible structures with application as force sensors, microneedle-based drug delivery systems, array of chemical sensors, etc. SU-8 photoresist is a promising candidate to fulfill such structure. Poly(Dimethylsiloxane) has been used as the sacrificial layer to successfully release...
A microplasma based on a microstrip split-ring resonator1 (SRR) discharge has been used in atmospheric pressure gas mixtures to deposit hard films onto glass substrates. The SRR can generate steady-state plasma densities2 on the order of 1014 cm−3, potentially allowing access to unique materials-processing parameter spaces.
PEDOT:PSS is a conductive polymer that is widely used as electrodes in organic electronic devices. This material can also be used for implementing deformable electrodes in soft substrates for MEMS applications. However, this material being sensitive to several chemicals and water it is difficult to pattern microstructures using standard techniques. Thus, we present several techniques for patterning...
Molecular sensor fabrication requires the development of methods to produce nanostructures and transfer them onto useful substrates. This paper will briefly describe methods of patterning and printing of highly oriented pyrolytic graphite (HOPG). HOPG has been patterned at the micron and ∼100 nanometer scale, using oxygen plasma etching and phase-shift lithography, respectively. The micron scale patterned...
A photoresist dispense and self-planarization (DSP) approach as a simple and cost-effective photoresist coating method has been exercised on a surface property modified substrate, where the oxygen plasma treatment of a substrate through a shadow mask selectively modifies the open area to a hydrophilic property. The non-plasma-treated area repels the dispensed photoresist while one on the plasma treated...
The technology to make high-quality, high-reliability solar modules with a high deposition rate for μc-Si thin-film is a problem for the industrialization of low-cost, high-conversion-efficiency a-Si/μc-Si tandem structure solar modules. Sanyo has solved this problem by developing an original CVD technique called Localized Plasma Confinement CVD and a new evaluation method for μc-Si thin film. A stabilized...
A low-temperature hydrogenation-assisted sequential deposition and crystallization technique is reported for the preparation of nano-scale silicon quantum dots suitable for light-emitting applications. The preparation of layers of quantum dots was by RF plasma-enhanced deposition and in-situ treatment of an amorphous silicon film followed by reactive-ion etching to create the nanoscale features. The...
A co-planar single walled carbon nanotube (SWCNT) electrode system with all electrodes (working, counter and reference) was fully microfabricated on a glass substrate. The process is based on: (a) a standard microfabrication process to define the conducting tracks and a nitride passivation, (b) a transfer printing of SWCNT film, and (c) a chlorination process of thin-film Ag to form AgCl reference...
In this work, an atmospheric pressure plasma device, which was constructed as a coaxial arrangement with a discharge electrode and a quartz tube of 6 mm in an inner diameter, was experimentally investigated. The plasma under the atmospheric pressure condition was formed into a noble gas (Ar) stream exposed to dielectric barrier discharges controlled by pulse high-voltage applications. The atmospheric...
This study proposed a Polydimethylsilcoxane (PDMS) concentration gradient microfluidic chip fabricated using MEMS, casting molding, and microimprinting technology. The chip is used to research on optimizing concentration of endothelial cells on glucose concentration gradient is extracted using this chip. In the experiment a concentration gradient in solution was generated by a microfluidic network,...
We report successful bonding of photodiodes on glass substrate using Au stud bumps by Au-Au surface-activated bonding at a relatively low bonding temperature of 150degC. A glass substrate with the flip-chip bonded photodiode chips was then vertically stacked on a Si substrate with the bonded laser diode chip using Au-Au surface-activated bonding. Applying this technique, compact and thin optical microsensors...
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