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IET Micro & Nano Letters > 2014 > 9 > 12 > 917 - 921
IEEE Transactions on Plasma Science > 2009 > 37 > 10-2 > 2082 - 2089
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 2 > 305 - 316
IET Micro & Nano Letters > 2014 > 9 > 12 > 917 - 921
IEEE Transactions on Plasma Science > 2009 > 37 > 10-2 > 2082 - 2089
IEEE Transactions on Semiconductor Manufacturing > 2009 > 22 > 2 > 305 - 316