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IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 2 > 328 - 339
IEEE Transactions on Nanotechnology > 2008 > 7 > 6 > 683 - 687
IEEE Transactions on Semiconductor Manufacturing > 2010 > 23 > 2 > 328 - 339
IEEE Transactions on Nanotechnology > 2008 > 7 > 6 > 683 - 687