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A previous study on long term reproducibility [1] demonstrated that CAMECA Wf can delivered the relative standard deviation (RSD) of the relative sensitivity factors (RSF) of boron (B) are typically 3.7%. Above results show that deviation can be estimated without testing the standards. This paper will demonstrate that the SIMS RSD depend significantly on the species concentration.
A surface layer formation by Cs+ bombardment was observed during ultra-thin oxynitride gate dielectrics depth profiling. A significant thickness change relative to ultra-thin layer of oxynitride was noticed when testing a bombarded sample after a period of time. Cs, O and N depth profiles were examined by Dynamic Secondary Ion Mass Spectrometry (DSIMS). The bombarded sample and new sample were investigated...
An advanced sample preparation protocol using Xe+ Plasma FIB for cross-sections wider than 400 μm is proposed. Challenging samples such as a BGA (CSP) or chip in a package often suffer from FIB milling artifacts. The results are unsatisfactory mainly due to different milling rates of the various materials (polyimide, tin, copper), ion beam induced ripples or due to significant topography. The process...
MM (Machine Model) is an ESD test method used to test for robustness of the device against the ESD event which is induced by the running equipment in fabrication or testing procedure [1]. Due to zero resistance in the equivalent circuit, MM is difficult to simulate. In most cases, MM capability can be calculated from HBM (Human Body Model) result (MM ∼10∼20∗HBM) [2]. But in this study HBM can reach...
This paper reports a study of transient behaviors of diode-triggered silicon-controlled rectifier (DTSCR) electrostatic discharging (ESD) protection structures for ultra-fast Charged Device Model (CDM) ESD protection. The DTSCR ESD protection structures, fabricated in a 28nm CMOS process, were characterized using a new combined Very Fast Transmission Line Pulse (VFTLP) testing and TCAD simulation...
In view of reducing the process development cycle times with plausible time-to-market goals, it is of great demands to speed up the assessment pace, but at the same time not to jeopardize for the high level of quality requirements. Highly robust designs and process margins are the key differentiators and should be enforced in particular for the automotive markets. In this work, development of the...
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