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Partial discharge phenomenon, which is not breakdown but has a potential to lead breakdown, is sometimes observed under AC operating voltage application in vacuum. We aim to investigate the partial discharge on the insulator surface in vacuum by the measurement of charge behavior and light emission. The surface charge distribution reached a quasi-stationary state by repetition of the partial discharge...
MEMS-based penetrating probe electrode devices have opened a new class of multi-site electrophysiological recordings of neurons/cells in a tissue with a high spatial resolution. Although these probes becomes a powerful tool in electrophysiology, the challenge still remains the tissue penetrations with small diameter probes for further low-invasive and safe tissue penetrations. However, it is difficult...
We demonstrated batch, pinpoint, and multisite-transfer of nanoparticles via vertically-aligned nanotip silicon probe arrays for powerful applications of nanoinjectors, including local drug delivery and DNA transfer into biological samples (e.g., cell, neuron and tissue). Although several nanoinjections have been demonstrated using “nanoprobe” (e.g., glass pipette, silicon nanowire and carbon nanotube...
We report a 8-12-μm-diameter 210-μm-length penetrating silicon probe array assembled by vapor-liquid-solid (VLS) growth, for use in multi-site recordings of neuron spikes in a brain cortex. A 3-μm-diameter silicon probe-tip metalized with platinum (Pt)-black by the electroplating, exhibits low enough probe impedance of 103 kΩ and a more than 90% output/input ratio (1 kHz) for spike recordings. Through...
In this letter, we report the heterogeneous integration of vertically aligned silicon (Si) microprobe arrays/(111) with MOSFET circuits/(100) by IC processes and subsequent selective vapor-liquid-solid (VLS) growth of Si. A hybrid Si-on-insulator (SOI) substrate with different species of Si layers, e.g., a (100)-top-Si/buried oxide/(111)-handle-Si system, was utilized for the heterogeneous integration...
We developed integration and three-dimensional (3D)-fabrication techniques to nanoscale-tip silicon-microprobe arrays for multiple electrical nano-measurement systems with a high aspect ratio. Vapor-liquid-solid (VLS) grown vertically-aligned 120??m-length silicon microprobe arrays (2??m-diameter), each with nanoscale-tip by controlling the silicon-etching (less than 100-nm-diameter, radius of curvature...
We report in-vitro multisite field potential recordings from fish retina using a vertically integrated silicon (Si) microprobe array. Eight active channels of the enlarged probe-head ldquoKokeshi (Japanese dolls)rdquo type Si probe enabled multisite electrical recordings of retinal responses (electroretinograms (ERGs)) to white light stimuli. The ERG a- and b-waves were obtained at each probe, and...
This paper presents a very thin silicon dioxide microtube electrode array, which has sub ten-micrometers in inner diameter, as a neural interface device with high signal-to-noise ratio and low invasiveness. The device was realized by using out-of-plane silicon dioxide microtube arrays fabricated from vapor-liquid-solid growth and microfabrication techniques. Here we report advantages of electrical...
We developed a batch-fabrication of nanoscale-tip silicon microprobe arrays for use in multipoint nanoscale investigations of cell/neuron in-vivo/in-vitro. Sharpened tips, less than 100nm diameter, can be formed at the tips of out-of-plane three-dimensional silicon microprobe (length >10mum) arrays, by silicon wet etching-based batch-process within only 1-3min, providing precisely controlled tip...
Vapor-liquid-solid (VLS) growth, using Si2H6 as the gas source of Si, can be used to realize intrinsic Si microprobe arrays, which could be doped by diffusion process (at 1100degC) after VLS growth. But in this work we have demonstrated that by incorporating in-situ doping using the gas source of Si2H6 and PH3 with VLS growth process, doped n-Si microprobes can be realized directly at a temperature...
Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully...
This paper describes the fabrication of Si micro probe and SiO2 micro tube array and their mechanical properties. The device is successfully fabricated with high-density array. One of the requirements of the penetrating device is to have the enough mechanical strength to be able to penetrate into the tissue. Hence mechanical properties are investigated and discussed using the results on bending obtained...
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