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Here we report vertical metal/silicon dioxide (SiO2) multiwalled microtube arrays as electrical and optical neuroprobes for “optogenetic”. Three-dimensional metal/SiO2-microtube arrays can be fabricated by vapor-liquid-solid (VLS) growth of silicon-wire, followed by the SiO2/metal depositions and the core-silicon etching. As the inside metal, we use iridium (Ir) with a low electrical electrolyte/electrode...
We demonstrated batch, pinpoint, and multisite-transfer of nanoparticles via vertically-aligned nanotip silicon probe arrays for powerful applications of nanoinjectors, including local drug delivery and DNA transfer into biological samples (e.g., cell, neuron and tissue). Although several nanoinjections have been demonstrated using “nanoprobe” (e.g., glass pipette, silicon nanowire and carbon nanotube...
In this paper, we present out-of-plane micro-scale diameter light guiding silicon dioxide tube arrays for use in optical stimulation of neurons. An optical propagation through the dioxide tube was calculated by using finite-difference time-domain (FDTD) simulation. Based on the calculated result, we designed and fabricated 3-μm-inner diameter 24-μm-height silicon dioxide tube arrays with the wall...
We developed integration and three-dimensional (3D)-fabrication techniques to nanoscale-tip silicon-microprobe arrays for multiple electrical nano-measurement systems with a high aspect ratio. Vapor-liquid-solid (VLS) grown vertically-aligned 120??m-length silicon microprobe arrays (2??m-diameter), each with nanoscale-tip by controlling the silicon-etching (less than 100-nm-diameter, radius of curvature...
We developed a batch-fabrication of nanoscale-tip silicon microprobe arrays for use in multipoint nanoscale investigations of cell/neuron in-vivo/in-vitro. Sharpened tips, less than 100nm diameter, can be formed at the tips of out-of-plane three-dimensional silicon microprobe (length >10mum) arrays, by silicon wet etching-based batch-process within only 1-3min, providing precisely controlled tip...
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