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A high-sensitivity tri-axis force sensor designed to measure the traction force of a single cell is reported. The developed sensor consists of a micropillar that is supported by a cross-shaped Si structure and a double-layer photoresist cap. The piezoresistors formed on the Si structure allow for the simultaneous measurement of the normal and shear forces acting on the micropillar. Moreover, the cap...
This paper reports on a fabrication method of three-dimensional micro structures supported by a Parylene thin film. The three-dimensional structure formation procedure starts with an out-of-plane actuation of the Si surface micromachined structure coated with a thin Parylene film. At the same time of the actuation, the environmental temperature was elevated above the glass transition temperature T...
We propose a measurement method of light transmittance of metamaterials by directly contacting the metamaterial on a Si photodiode. Our measurement method enables direct detection of not only the propagation wave component but also the evanescent wave component through the metamaterial. In this paper, we fabricated a layered metal-dielectric metamaterial composed of Ag / Al2O3 layers on the Si photodiode...
We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated...
An absolute pressure sensor based on liquid cantilever diaphragm is described in this paper. The diaphragm was fabricated by using liquid to bridge the gap between a piezo-resistive cantilever and the surrounding walls. Due to surface tension, the liquid filled the cantilever's gap while it did not leak through the gap. A cavity was designed under the diaphragm as a reference pressure. By choosing...
The differential pressure sensors are used for various applications. In this work, a piezoelectric differential pressure sensor using an aluminum nitride (AlN) thin film cantilever is proposed to achieve high sensitivity and low power consumption. The dimensions of the cantilever are 1500 µm × 1000 µm × 2 µm. The proposed sensor needs no power consumption in the AlN sensing element in principle. The...
We report on the direct measurement of the pressure distribution of the contact surface between an elastic block and a rigid plate during the onset of slip. The measurement was carried out by using an array of seven MEMS pressure sensors embedded inside the elastic block. The results showed that the external loading force in lateral direction caused the inhomogeneous change in pressure along the contact...
This paper describes a Si nano-pillars array for measuring traction forces of one singular filopodium (100–300 nm in diameter). We fabricated the Si nano-pillar which was 110 nm in diameter and 1.5 µm in length. Fibroblasts were cultured on the Si nano-pillar array. The filopodium of fibroblast adhered to pillar and dragged it. We calculated the traction force from the deflection of the pillar. When...
This paper reports an integration method of bridging-structural CNTs (carbon nanotubes) onto a Si wafer using stamping transfer. The bridging-structural CNTs which were directly synthesized by CVD (chemical vapor deposition) between two Si microstructures were picked up by PDMS (polydimethylsiloxane) stamping sheet. The picked up bridging-structural CNTs and the supporting Si microstructures were...
We propose a skin-type tactile sensor with standing piezoresistive cantilever to detect micro size texture of object. By forming micro ridges to the sensor surface as a finger print, the sensitivity of the tactile sensor increased for micro texture scanning. This characteristic enabled the detection of 500nm high 300μm wide bumps arranged with 50μm pitch on a flat surface. This...
We propose a triaxial force measurement cantilever with piezoresistors fabricated by rapid thermal diffusion sidewall-doping. The device is developed as a tool for applying quantitative mechanical stimuli to cells and measuring their mechanical properties at the same time. The device consists of a sensing tip, two sensing beams, and four wiring beams. We form piezoresistors on the surface of the sensing...
This paper reports on a method for estimating direction of a sound with one directional acoustic sensor. Inspired by the two input structure of bushcricket ear, our sensor was designed to have an acoustic channel and a micro piezo-resistive cantilever. The radiated sound acts simultaneously on the external and on the inner surface of the cantilever. As the result, the directionality of our sensor...
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