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This letter reports on a mechanically reconfigurable frequency-tunable microstrip antenna that uses a liquid actuator as the dielectric layer to reduce the antenna size compared to the wavelength. By using direct polymer vacuum deposition on a liquid, the dielectric liquid can be encapsulated inside the polymer to form an actuator, which can change the liquid thickness. When the actuator is situated...
This paper presents an approach to measure the propagation of surface acoustic waves (SAW), using a piezoresistive cantilever array. SAW was measured by cantilevers designed at the liquid-substrate interaction area by utilizing the structure of liquid-cantilever-air, which is highly sensitive and is able to measure acoustic wave at high frequency. Experiment results demonstrate that the measurable...
This paper reports a method to measure viscosity based on the resonant vibration of droplets on a piezoresistive cantilever array. We demonstrate that viscosity of small droplets (3µL) can be estimated from the attenuation rate of the cantilever output during free-decay of the droplet vibration. The estimation for liquid sample with different viscosity using water-glycerol solutions were carried out.
We fabricated flexible humidity sensor which responds 10 times faster than commercial CMOS humidity sensor. Our sensor is based on Ionic-Gel-coated Fabric (IG-Fabric). We use EMIMBF4 as ionic liquid and mixed with PVDF to fabricate ionic gel. The EMIMBF4 has a characteristic that it absorbs H2O and changes its impedance. IG-Fabric has wide surface area and high gas permeability so that gases can be...
We propose a CO2 gas sensor based on an impedance change of ionic gel (IG) according to the CO2 gas concentration. The sensor consists of an IG film patterned on electrodes. The impedance of the IG changes when the IG absorbs CO2 gas. CO2 gas concentration can be detected by measuring the amount of impedance change. Our proposal sensor has a merit that power consumption is very low (<1μW). It is...
An absolute pressure sensor based on liquid cantilever diaphragm is described in this paper. The diaphragm was fabricated by using liquid to bridge the gap between a piezo-resistive cantilever and the surrounding walls. Due to surface tension, the liquid filled the cantilever's gap while it did not leak through the gap. A cavity was designed under the diaphragm as a reference pressure. By choosing...
We show that, in Parylene films fabricated by Parylene-on-liquid-deposition (POLD), the side in contact with the liquid during deposition develops a porous surface. Because of the liquid nature of such a deposition substrate, the molecules of Parylene monomer can diffuse into and polymerize inside the liquid, which is probably the main cause of this effect. We also found that the dimension of the...
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