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This letter reports on a mechanically reconfigurable frequency-tunable microstrip antenna that uses a liquid actuator as the dielectric layer to reduce the antenna size compared to the wavelength. By using direct polymer vacuum deposition on a liquid, the dielectric liquid can be encapsulated inside the polymer to form an actuator, which can change the liquid thickness. When the actuator is situated...
We report a tapered liquid waveguide for an optical fiber-to-chip coupler. The tapered liquid waveguide has a smooth surface and has both a large structure and a micro structure on one chip. The waveguide is able to couple optical fibers of large-diameter to small MEMS devices. A Parylene film on the liquid prevented the liquid from deformation and evaporation. We fabricated the silicone oil waveguide...
The design and fabrication process of an electrically-driven varifocal liquid microlens are reported with experimental measurement results and a theoretical calculation model. Droplets of oil are sandwitched between a glass wafer and a thin-film of parylene chemical vapor deposited (CVD) directly onto the droplets' liquid surface. A method for creating fluid-filled micro chambers was realized with...
We propose an insertion force sensor with piezoresistors fabricated by sidewall-doping with rapid thermal diffusion. The sensor consists of a main body, to which a pointed tip is installed, and supporting beams whose sidewalls are made piezoresistive. When an insertion force is applied to the tip and the silicon structure deforms, the change of the strain distribution condition on the piezoresistive...
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