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In this paper, the design and characterization of the sloped-field-plate enhanced trench edge termination structure are carried out. For achieving the ideal planar junction breakdown voltage and high dV/dt performance, structural parameters, including the depth of the sloped-field-plate and the depth and width of the trench, need to be well designed. Using extensive numerical simulations, the above-mentioned...
In this paper, a novel edge termination structure for achieving the ideal breakdown voltage of the planar junction is numerically analyzed and experimentally demonstrated. The structure features a trench filled with BCB (BenzoCycloButene) dielectric, and is fabricated along with a high-voltage p-n junction diode. Furthermore, a sloped field plate (connected to the anode electrode) is buried inside...
For the first time, an efficient and universal method to design multiple field limiting rings (FLR) structure, which applicable to power devices with thin drift layer is proposed. Avalanche breakdown simulations of simplified structures are performed in each three area; the near main junction area, the outmost area, and the other. From simulation results, optimal spacing between each neighboring FLR...
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