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Silicon tip fabrication by wet anisotropic etching using Potassium Hydroxide (KOH) and Tetra Methyl Ammonium Hydroxide (TMAH) was studied under varying process conditions using thermal oxide as a mask. The fabrication was carried out using only wet etching with a single layer of optical lithography. The mask structures used for the formation of tips were circles of different dimeter ranging from 30...
Borosilicate (BSG), Phosphosilicate (PSG) and Borophosphosilicate (BPSG) films were deposited using TEOS by low pressure chemical vapor deposition. The effect of dopant gases PH3 and B2H6 on properties of the films were studied by varying their flow rates from 0 to 25 sccm keeping the temperature, pressure, TEOS bubbler conditions and deposition duration constant. Deviations in the deposition rate,...
A two-heterogeneous servers queue with system disaster, server failure and repair is considered. In addition, the customers become impatient when the system is down. The customers arrive according to a Poisson process and service time follows exponential distribution. Each customer requires exactly one server for its service and the customers select the servers on fastest server first basis. Explicit...
Deep vertical etching of Si using hydrogen peroxide as oxidant and Au as catalyst has been studied in terms of relative reactant concentrations and catalyst morphology. The concentrations of hydrogen peroxide and hydrofluoric acid are highly important and the ratio of the same can be varied to achieve isotropic to highly anisotropic vertical etching. Catalyst morphology and positioning of the substrate...
SiGe thin layers were deposited using LPCVD at different temperatures and pressures. The effect of the growth characteristics on the composition, grain growth and crystallinity were studied with the aim of maximizing the tensile stress of the films deposited. As expected, at constant reactant gas ratios, temperature had the maximum effect, with stress changing from compressive to tensile at higher...
We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology...
In Multilevel Inverters, Cascaded H bridge converters are considered to be the most preferred form of converters. But in these converters as the number of staircase levels in output voltage increases the dc source requirement also increases, thereby limiting its application. This paper tries to address the above mentioned problem by developing a Modified version of Cascaded Multilevel Converters which...
Copolymers of o-/m-toluidine with o-nitroaniline were chemically synthesized in various molar ratios of the comonomers by emulsion polymerization. Although o-nitroaniline does not homopolymerize, the copolymers of o-nitroaniline with o-/m-toluidine could readily be synthesized. The copolymers show comparatively higher conductivity, better solubility and higher thermal stability than the homopolymers,...
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