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To realize a next generation strategy for Japanese agriculture and livestock husbandry, especially aiming at developing a high effective electronic management system for cow rearing farmers. We developed a rumen pH sensor which can implement a real-time monitoring of pH value in cow rumen with low power consumption and high accuracy. The prototype of pH sensor was fabricated and packaged, which can...
We demonstrated a wireless vibration sensing system powered by a piezoelectric vibration energy harvester (VEH). The VEH with an AlN piezoelectric film was fabricated using a standard semiconductor micro electric mechanical system technology. Vibration with >0.45 m/s2 acceleration was applied to the VEH and a 40 bit payload was successfully sent using 920 MHz wireless communication technology driven...
A bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in DTIP 2011. A linear relationship between the peak value of the impulsive output voltage and the DC current was obtained based on a macro-scale prototype device. In DTIP 2013, an oscillating type MEMS DC current...
A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was first proposed in our previous work (DTD? 2011). A MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was then micro-fabricated for preliminarily examination (DTD? 2012). Recently,...
A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). Recently, a MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was micro-fabricated for preliminarily examination (DTIP 2012). Different from...
We proposed a thin piezoelectric cantilever to measure an airflow velocity change. An airflow sensor using a PZT cantilever and a flow channel was fabricated. We measured the relationship between the airflow velocity change and the piezoelectric voltage of the cantilever. The dimensions of the sensor and the cantilever are 25 mm × 20 mm × 20 mm and 1500 μm × 1000 μm × 2 μm respectively. We evaluated...
The super-harmonic effect has been studied using a piezoelectric micro-cantilever with a proof mass. The fabricated prototype device, comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO2 deposited on a silicon-on-insulator (SOI) wafer, has been measured to have an eigenstate frequency of around 816 Hz. The driven frequencies of 204, 272, 409 and 816 Hz have been then converted into the resonant one...
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