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We prpose Al-doped zinc oxide (AZO) grown on sapphire substrate using dual-plasma-enhanced metal-organic chemical vapor deposition (DPEMOCVD). The crystalline quality, optical properties, and electrical characteristics of AZO depend on the deposition temperature. The AZO thin film grown at 185 ºC shows the highest intensity of (002) preferent orientation for X-ray diffraction (XRD) pattern, highest...
This study proposes flexible organic light-emitting diodes (OLEDs) grown on polyestersulfone (PES) using Al-doped zinc oxide (AZO) as the anode, fabricated by the dual-plasma-enhanced chemical vapor deposition (DPEMOCVD) system. The experimental results including crystalline structure, optical, and electrical characteristics indicate that the quality of AZO films grown on PES depends on the deposition...
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