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This paper describes an inspection technique for detecting bonding defects in interfaces of stacked wafers that have complicated patterns. This technique detects the minute defects as statistical outliers from scanning acoustic tomography images that include the pattern formed repeatedly. The experimental results show that one-pixel size defects near the complicated patterns can be detected from ultrasound...
This paper describes an image restoration technique that improves the sharpness of an inspection image for LSI packages using a scanning acoustic tomograph(SAT). This technique performs optimal restoration, depending on the type of probe used for imaging, by estimating the intensity distribution of the ultrasonic beam at the interface of testing and by eliminating the influence. The result of an experiment...
We have developed three new gate tracking functions to acquire dead-pixel-free and fine inspection images for advanced LSI packages with rough surface using a scanning acoustic tomo-graph. These are predicted surface gate tracking, double surface gate tracking and predicted S2-gate tracking methods. The advantages of these functions are demonstrated by using various test samples.
We have newly developed a scanning acoustic tomograph with higher resolution and detectability than the conventional type. The system can be equipped with a special signal processing unit that has been designed in order to emphasize the high frequency component of ultrasound. The signal processing unit enhanced the resolution and signal to noise ratio. Because of improvement in the signal to noise...
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