The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
Microelectromechanical switches are of interest for low-power circuit applications due to their minimal OFF state leakage current. This paper uses 22-nm CMOS fabrication technology and the clamped cantilever geometry as the basis for establishing design rules for electrostatic nanorelays and estimates the design parameters needed for nanorelay actuation. The adhesive pull-off force of various substrate/cantilever...
This paper summarizes and reports systematical studies of Cu-based bonding technology for 3D IC applications. Hybrid Cu-oxide and Cu-polymer bonding designs and schemes are investigated. Electrical performances and reliability of Cu bond structures provide important guidelines for future 3D IC applications.
Densely packed carbon nanotube (CNT) forest on silicon wafer has been fabricated by combining the process of mechanical press and liquid densification. Advantages from the densely packed CNT forest prototype devices include: (1) 16-fold volume reduction with the same amount of CNT forest as compared to the as-grown CNT forest; (2) preservations of aligned CNT organization and natural contacts to the...
This paper presents a state-of-the-art 28nm CMOS technology using conventional poly gate and SiON gate dielectric (Poly/SiON) with best-in-the-class transistor performance, SRAM SNM (static noise margin), MOM capacitance density and mismatch, and ULK (k=2.5) interconnect. The ION are 683 and 503 uA/um (at IOFF = 1nA/um, VDD=1V) for the n- and p-MOSFET, respectively. (With normalized tOX and VDD, these...
Stretchable sensor arrays have applications in robotics, structural health monitoring (SHM) devices, and electronic textiles applications where they can be mounted directly on nonplanar surfaces. For robotics, pressure sensor arrays mimic the human sense of touch, providing sensory feedback to help the robot move in a controlled manner. Our research investigates a novel microelectronic process sequence...
Analog-to-digital conversion plays an essential role in all kinds of electronics systems, including signal processing, communications and storage. In particular, interpolated flash ADC has been widely used in high-speed systems requiring very high sampling speed. Obviously, practical ADC design is very challenging, which has been dominated by experiences and trial-and-error skills. This is true to...
A new combined AC/DC-coupled output averaging technique for input amplifier design of flash analog-to-digital converters (ADC) is presented. The new offset averaging design technique takes full advantages of traditional DC-coupled resistance averaging and AC-coupled capacitance averaging techniques to minimize offset-induced ADC nonlinearities. Circuit analysis allows selection of optimum resistance...
This work presents the development of a capacitive tactile and shear-stress sensing array which can be easily and reliably fabricated by using MEMS techniques and flexible printed circuit board (FPCB) technologies. The sensing array consists of two micromachined PDMS structures and an FPCB with sensing electrodes. Each shear sensing element comprises four capacitive sensing element arranged in 2??2...
Planar micro supercapacitors utilizing vertically aligned carbon nanotube (CNT) forests with the design of interdigital electrodes have been demonstrated. Conductive substrates using Mo/Al/Fe metal stack shows best CNT forest synthesis results with high electrical conductivity and dense CNT structures. Prototype devices show measured specific capacitances about 1000 times higher than those with plain...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.