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The steering characteristic of tracked robot was mastered by analysing its steering principle. Under certain road conditions, the experiments of accurate steering control were finished by modifying the velocity parameters of two tracks. The relationship is gained between the speed of robot's tracks and the steering motion of the robot through analysing robot's steering-kinematic principles. Under...
In order to monitor the environmental parameter of underground coalmine, a suspended line inspection robot was designed, which includes many monitoring modules to monitor safety parameters continuously and in real time, such as gas density, CO density, temperature, humidity, and so on. According to the characteristics of multi-body dynamics modeling method, large displacement and nonlinear analysis...
This study demonstrates a SOI condenser MEMS microphone consisting of planar interdigitated sensing electrodes, deformable diaphragm, and back chamber. No back-plate is required for this design, thus, the acoustic impedance is reduced. The merits of this study are: (1) the back-plate is replaced by planar interdigitated sensing electrodes to prevent in-use pull-in and process stiction between diaphragm...
The stacking of metal/tungsten layers as the sensing electrodes for CMOS-MEMS microphone without the back-plate has been proposed and demonstrated for the first time. The acoustic pressure will deform the spring-diaphragm structure and further cause the in-plane gap-closing between sensing electrodes. Thus, acoustic pressure and dynamic response of spring-suspension can be determined by the sensing...
This study presents a novel CMOS-MEMS 3-axis accelerometer design using TSMC 0.18µm 1P6M CMOS process. Thus, the footprint size of 3-axis accelerometer is significantly reduced to 400×400µm2 by the single proof-mass design, Due to the novel fully-differential gap-closing sensing electrode design in all three sensing directions, the sensitivities of 3-axis accelerometer are improved. Moreover, by means...
This study demonstrates a novel monolithic TPMS (tire pressure monitoring systems) using CMOS MEMS processes. This TPMS monolithic integrates the 3-axis capacitive accelerometer, capacitive pressure sensor, and platinum (Pt) thermal-resist temperature sensor on a single chip. The TPMS has been successfully implemented using TSMC 2P4M process and our in-house post-process. The footprint of TPMS chip...
This study presents a novel design to improve the sensitivity and resolution of the capacitive-type CMOS-MEMS sensors. This design employs the dielectric films as the MEMS structures, and the metal films as the electrodes and sacrificial layers. There are three merits of this design, (1) the parasitic capacitance is significantly reduced by the dielectric structure, (2) very small in-plane and out-of-plane...
This study presents a novel double-side CMOS post-process to monolithically integrate various capacitance type CMOS sensors on a single chip. In applications, the pressure sensor and linear accelerometer have been realized and monolithic integrated using the TSMC 2P4M process and the present post-process. The measurement results show that sensitivities (non-linearity) of the pressure sensor and the...
This study presents a novel inertia sensor design to monolithic integrate x, y, and z-axis accelerometers on a single chip. The chip is implemented using the TSMC 0.35 mum 2P4M CMOS process, and post metal wet-etching and dielectric dry-etching processes. Thus, the fully-differential capacitance sensing in-plane and out-plane CMOS accelerometers are realized. The measurement results demonstrate the...
This study demonstrates the possibility of implementing lens system via CMOS process. The ever first CMOS based optical focusing system successfully demonstrated focusing capability, with 5um by 6um focus spot size at 6 Hum, and capable of moving focal point 12um in axial direction. This system is composed of a lens set and an electrothermal actuated optical bench. One PDMS dispensed planar-convex...
This study presents a novel CMOS out-of-plane linear accelerometer. This capacitance type out-of-plane accelerometer contains special designed gap-closing sensing electrode arrays with fully differential sensing circuits. Moreover, this study established a post-CMOS wet-etching process to realize a sub-micron sensing-gap between stationary and moving electrodes in the out-of-plane direction. Thus,...
The phase locking control method to ensure the operating of MEMS actuators at their resonant frequency is presented. In this study, the control algorithm was simulated by the MATLAB. Further, an optical scanner fabricated using the SOI wafer was employed to demonstrate the present technique. Thus the variation of the scanning angle resulted from the offset of the natural frequency of the devices can...
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