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Over the past two years the Predictive Maintenance (PdM) capability in semiconductor manufacturing has migrated from Proof-of-Concept (PoC) and univariate Fault Detection (FD) extrapolation mechanisms to fab-wide solutions that are (1) robust to typical process and equipment disturbances, (2) extensible so as to provide solution approaches that are portable across instances of a tool type and across...
Bi-polar arcs require a high voltage difference between two closely spaced points. As an example, if there is excessive deposition or contamination on the deposition and or cover ring in a physical vapor deposition tool (PVD) tool, a DC bipolar arc can occur leading to ablation of underlying materials, wafer breakage, or chamber damage caused by the discharge. In some cases these incidents are not...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.