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SiAlON thin films were deposited by RF magnetron co-sputtering of Al and Si targets in Ar/O2/N2 mixtures to a thickness of ~200nm onto both bare and Pt-coated r-cut sapphire substrates. Films deposited at 200°C are amorphous as determined from X-ray diffraction (XRD) and have <1nm RMS roughness as measured by X-ray reflectivity (XRR). In situ X-ray photoelectron spectroscopy (XPS) measurements...
This paper reports on the assessment of LGT acoustic material constants and temperature coefficients by surface acoustic wave (SAW) delay line measurements up to 130degC. Based upon a full set of material constants recently reported by the authors, seven orientations in the LGT plane with Euler angles (90deg, 23deg, Psideg) were identified for testing. Each of the seven selected orientations exhibited...
Acoustic wave propagation in piezoelectric crystals with point group 32 symmetry is strongly dependent on the specific crystal orientation. This paper reports an X-ray diffraction (XRD) method using pole figures and in-plane scattering measurements to precisely define the absolute orientation of crystal planes in langatate (LGT). XRD measurements were conducted on Z-cut and plusmn45deg Y-rotated LGT...
Sensor operation in harsh environments up to 1000degC requires robust packages including stable electrodes and protective coatings. We have developed nanostructured ultra-thin (< 100 nm) Pt-10%Rh / ZrO2 electrode structures grown by e-beam co-evaporation that operate at temperatures approaching 1000degC. X-ray diffraction (XRD), resistivity, and electron microscopy (EM) studies indicate incorporation...
Langatate (LGT) has been grown and characterized more intensively in the past decade and the reported acoustic wave properties of this relatively recent crystal have shown significant variations among different groups. Yet to be determined is how much of this dissimilarity is attributable to variations in the growth process or to different measurement techniques. For the dielectric permittivity, in...
This work reports on the importance of considering the couplant between a fused silica buffer rod and the piezoelectric sample in pulse echo overlap measurements. A transmission line model is used to account for the couplant effect in the measurement of bulk acoustic wave (BAW) phase velocities. The couplant correction theory and the experimental procedure and setup are detailed in this paper. Experiments...
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