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SiAlON thin films were deposited by RF magnetron co-sputtering of Al and Si targets in Ar/O2/N2 mixtures to a thickness of ~200nm onto both bare and Pt-coated r-cut sapphire substrates. Films deposited at 200°C are amorphous as determined from X-ray diffraction (XRD) and have <1nm RMS roughness as measured by X-ray reflectivity (XRR). In situ X-ray photoelectron spectroscopy (XPS) measurements...
Sensor operation in harsh environments up to 1000degC requires robust packages including stable electrodes and protective coatings. We have developed nanostructured ultra-thin (< 100 nm) Pt-10%Rh / ZrO2 electrode structures grown by e-beam co-evaporation that operate at temperatures approaching 1000degC. X-ray diffraction (XRD), resistivity, and electron microscopy (EM) studies indicate incorporation...
A monolithic spiral coil acoustic transduction (MSCAT) sensor that combines and improves upon the positive features of other acoustic wave sensors has been developed. The MSCAT sensor consists of an AT-cut quartz substrate that has a bare sensing surface and a photolithographically deposited multi-turn gold spiral coil on the opposite surface. The spiral coil acts as an antenna that radiates a time...
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