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This paper reports an on chip nano-optomechanical SRAM, which is integrated with light modulation system on a single silicon chip. In particular, a doubly-clamped silicon beam shows bistability due to the non-linear optical gradient force generated from a ring resonator. The memory states are assigned with two stable deformation positions, which can be switched by modulating the control light's power...
Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated,...
We report an SOI based 1×4 coarse wavelength-division-multiplexer (CWDM) planar concave grating multiplexer/demultiplexer and its application in re-configurable optical add/drop multiplexer (ROADM) system. We employed recursion numerical method to build a low aberration, non-circle grating circle model of concave grating. We fabricated the device using CMOS compatible silicon planar integration technology...
A monolithically integrated sensor based on photovoltage technique is developed for kidney metabolism detection under drug toxicity. The sensor utilizes the light-addressable potentiometric sensor with an electrolyte-insulator-semiconductor (EIS) structure for measuring cellular metabolic rate, and a gold metal layer is deposited on partial surface of silicon dioxide for extracellular redox (reduction-oxidation)...
A tunable laser based on double-ring external resonant cavity is designed, fabricated and tested. The double-ring resonator external cavity consists of a silicon waveguide ring resonator, a p-i-n doped silicon ring resonator, and a superluminescent diode (SLED). The laser is fabricated on a SOI wafer and the wavelength is tuned by injecting electrical currents to p-i-n structures. In the experiment,...
This paper reports a 3-dimensional (3D) micro-optical coupling system for improving coupling efficiency in the Littrow configured micro-electro-mechanical system (MEMS) tunable lasers. In the coupling system, an optical fiber acts as a rod lens for light convergence in the vertical plane, while a deep-etched silicon parabolic mirror confines the light in the horizontal plane. Compared with previous...
We report a SOI based 1×4 coarse wavelength-division-multiplexer (CWDM) planar concave grating multiplexer/demultiplexer and applications in re-configuration optical add/drop multiplexer (ROADM) system. For design, we employed recursion numerical method to build a low aberration, non-circle grating circle model of concave grating. For experiment, CMOS compatible silicon planar integration technology...
We propose optical switches in which the heater is fabricated directly on the slab region of the rib waveguide. Two types of Heater-on-Slab (HoS) switches were investigated. In the first type, the silicon slab regions are doped highly to form the heaters. For this type of switches, the switching power is ~85 mW and the switching time is ~27 μs. In the second type, a strip of metal in direct contact...
This paper reports a compact silicon-based thermo-optic switch using photonic wire waveguides. The switch is constructed in Mach-Zehnder interferometer (MZI) configuration on a silicon substrate. The switching operation is achieved through thermo-optic effect. In the experiments, an extinction ratio about 25 dB at the wavelength of 1590 nm is obtained. The switching power is around 180 mW.
This paper reports a miniature MEMS tunable dual-wavelength laser by integrating a gain chip, a beam splitter, and a pair of Bragg reflectors which has different periods. In the experiment, simultaneous two wavelengths emissions are observed with a thermo-optic tuning range of 1574.7 nm to 1578.6 nm and 1576.1 nm to 1582.6 nm, respectively.
This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80...
This paper presents a digital mirror for tunable laser wavelength selection using microelectromechanical systems (MEMS) technology. The digital mirror which has discrete reflection spectrum is totally different compared to the current broadband mirrors MEMS tunable lasers . The reflection of the digital mirror can be tuned by digital pumping signals which promise fast output wavelength switching....
The paper presents a thermo-optic tunable laser that makes use of a micromachined etalon to form the external cavity. The wavelength tuning is obtained by the thermo-optic effect of the silicon material. In experiment, a wavelength tuning range of 14 nm is demonstrated by applying a heating current of 18.7 mA to a deep-etched silicon etalon of 206 mum wide. In the dynamic test, this laser measures...
This paper presents a micromachined tunable laser that utilizes a silicon optical tunneling structure to tune both the polarization state and the wavelength of the laser output. The device is fabricated on silicon-on-insulator wafer using deep reactive ion etching. In experiment, the wavelength and the polarization are tuned by heating up the silicon optical tunneling structure via the thermo-optic...
This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2- mum wide and 40-nm thick patterned...
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