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With the rapid development of miniaturized multi-functional systems, micro-energy-storage devices have drawn increasing attention due to the importance of power supply. In this paper, a novel fabrication for freestanding solid-state micro-supercapacitors (MSCs) has been proposed and developed by combining electrolyte transferring with laser patterning process. Typical freestanding MSC is composed...
In this paper, we present a novel wearable flexible supercapacitor with the conductive carbon-nanotube (CNT)/fabric electrode and PVA/H3PO4 solid-state electrolyte, which is cost-effective and can be easily mass produced. Two kinds of fabric as the electrode substrates, cotton knitting fabric and polyester-fiber knitting fabric, are used for comparison respectively. The flexible fabric-based supercapacitors...
This paper reports a novel multi-functional self-powered pressure sensor with hierarchical wrinkle structure which is able to detect pressure as well as harvest the mechanical energy. Due to the utilization of hierarchical wrinkle structure, the device shows high sensitivity of 2.0 kPa-1 with the excellent response performance of 0.15 ms (rise-time) and 0.7 ms (release-time), respectively. In addition,...
This paper presents a cost-effective method to transfer vertically aligned carbon nanotubes (VA-CNTs) with Poly(dimethylsiloxane) (PDMS). Here, in this process, we take the advantage of PDMS solution as the transfer medium, meanwhile utilize the good wetting of this solution on another cured PDMS film to realize efficient transfer. The SEM images of transferred CNTs were taken to characterize the...
This paper presents an efficient fabrication process of highly aligned P(VDF-TrFE) nanofibers based on conventional far-field electrospinning (CFES) technique. By attaching a comb-shape electrode onto a fast rotating drum, the process combines the advantages of plane electrode and rotating-drum-collecting methods, which leads to the orientation of the deposited nanofibers and enhances it. Additionally,...
In this paper, we present a novel compressible solid-state supercapacitor with PVA/H3PO4 solid-state electrolyte and folded carbon-nanotube (CNT)/paper electrode. In this structure, both of the compression tolerance of folding structure and the strain capability of CNT film contribute to achieve high compression-tolerant abilities of the electrode, which can be widely used in various environments...
This paper reports a single-step and cost-effective method to fabricate ultrathin Poly(dimethylsiloxane) (PDMS) membrane with honeycomb-like nanostructure on silicon substrate. The method is based on the template prepared by colloidal nanoparticles self-assembly. The thickness and nanostructure of the membrane are both determined by the size and surface morphology of two dimensional colloidal nanoparticles...
In this paper, we present the tunable wetting behavior of Poly(dimethylsiloxane) (PDMS) by nanostructuring and plasma treatments, which shows stable superhydrophobicity and superhydrophilicity. The PDMS film with high-density nanoporous was prepared by replica molding of the black silicon surface fabricated by an improved deep reactive ion etching (DRIE) process. This simple nanostructuring can increase...
Miniaturization, high density, multi-function and low cost of electronics has brought more requirements and challenges to the substrate and package level. This, in turn, has added more functionality to the substrate compared to the printed circuit board. A substrate embedded with both the active and the passive components, is also referred to as a functional substrate. In this paper, we propose, design,...
In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabrication process is simple, using surface micromachined technology with three masks. Two types of spiral inductor were fabricated and the measured results showed that the spiral inductors had high performance at high frequency. The maximum quality of the spiral inductor-Type A is 15.8 at 1.4 GHz with...
A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high fres (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6 GHz) and the inductance is 1.81 nH at peak-Q frequency.
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