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With the rapid development of miniaturized multi-functional systems, micro-energy-storage devices have drawn increasing attention due to the importance of power supply. In this paper, a novel fabrication for freestanding solid-state micro-supercapacitors (MSCs) has been proposed and developed by combining electrolyte transferring with laser patterning process. Typical freestanding MSC is composed...
This paper presents a cost-effective method to transfer vertically aligned carbon nanotubes (VA-CNTs) with Poly(dimethylsiloxane) (PDMS). Here, in this process, we take the advantage of PDMS solution as the transfer medium, meanwhile utilize the good wetting of this solution on another cured PDMS film to realize efficient transfer. The SEM images of transferred CNTs were taken to characterize the...
This paper presents an efficient fabrication process of highly aligned P(VDF-TrFE) nanofibers based on conventional far-field electrospinning (CFES) technique. By attaching a comb-shape electrode onto a fast rotating drum, the process combines the advantages of plane electrode and rotating-drum-collecting methods, which leads to the orientation of the deposited nanofibers and enhances it. Additionally,...
This paper reports a single-step and cost-effective method to fabricate ultrathin Poly(dimethylsiloxane) (PDMS) membrane with honeycomb-like nanostructure on silicon substrate. The method is based on the template prepared by colloidal nanoparticles self-assembly. The thickness and nanostructure of the membrane are both determined by the size and surface morphology of two dimensional colloidal nanoparticles...
Miniaturization, high density, multi-function and low cost of electronics has brought more requirements and challenges to the substrate and package level. This, in turn, has added more functionality to the substrate compared to the printed circuit board. A substrate embedded with both the active and the passive components, is also referred to as a functional substrate. In this paper, we propose, design,...
In this paper, fabrication and performance of RF MEMS planar spiral inductors is presented. The fabrication process is simple, using surface micromachined technology with three masks. Two types of spiral inductor were fabricated and the measured results showed that the spiral inductors had high performance at high frequency. The maximum quality of the spiral inductor-Type A is 15.8 at 1.4 GHz with...
A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high fres (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6 GHz) and the inductance is 1.81 nH at peak-Q frequency.
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