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A high-performance three-dimensional (3-D) microinductor was fabricated by using MEMS technology. This inductor has an air core and copper coils. The measurement results show that this inductor has high quality (Q) factor over wide range of operating frequency and high fres (self-resonant frequency). The maximum Q-factor of this inductor is 38 (@6 GHz) and the inductance is 1.81 nH at peak-Q frequency.
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