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This paper reports 5-μm-diameter and 400-μm-length ultra high-aspect-ratio needle electrodes for neuronal action potential recordings in vivo. The needle-electrode was vertically assembled on a 1 × 1 mm2 block module of silicon by vapor-liquid-solid (VLS) silicon growth technology for ∼ 7 hours. After metallization and encapsulation of the needle, the module device was packaged for in vivo animal...
Intracellular recording nanoscale electrode devices provide the advantages of a high spatial resolution and high sensitivity. However, the length of nanowire/nanotube‐based nanoelectrodes is currently limited to <10 μm long due to fabrication issues for high‐aspect‐ratio nanoelectrodes. The concept reported here can address the technological limitations by fabricating >100 μm long nanoscale‐tipped...
The length of nanowire/nanotube‐based nanoelectrodes is currently limited to <10 μm due to fabrication issues for high‐aspect‐ratio nanoelectrodes. On page 2846, T. Kawano and co‐workers demonstrate how a fabricated microneedle‐based nanoscale‐tipped electrode, over 100‐μm long, can penetrate into muscle cells and observe the resting potentials from cells.
Here we report integration of nanoscale tipped 120-μm-long vertical microprobe electrode (NTE) array and intracellular recordings using a gastrocnemius muscle of a mouse. The tip diameter and curvature radius of the NTE was < 200 nm, respectively, and the controlled height of the exposed tip section was 4 μm. The impedance of the fabricated NTE exhibited 3.1 MΩ at 1 kHz in saline, with the output/input...
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