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Progressive cardiac diseases due to population aging lead to stimulate research and innovation. Moreover, recent development in the miniaturization of microsystem offers a tremendous opportunity for medical implantable application. This paper introduces a new technology that integrates a Micro Electro-Mechanical Systems (MEMS) accelerometer and an Application-Specific Integrated Circuit (ASIC) inside...
The objective of this paper is to present a new technology that integrates a Micro Electro-Mechanical Systems (MEMS) accelerometer and an Application-Specific Integrated Circuit (ASIC) chip encapsulated in a hermetic silicon box that could be embedded in a transvenous cardiac lead in order to sense the endocardial acceleration signal. The originality of the approach consists of using an interposer...
A phenomenological approach is developed to identify the physical parameters causing the dc-voltage-induced tunability of aluminum nitride (AlN) acoustic resonators, widely used for RF filters. The typical resonance frequency of these resonators varies from 2.038 GHz at -200 V to 2.062 GHz at +200 V. This indicates, based on these RF measurements versus dc bias and the model used, that the AlN stiffness...
Thin Film packaging (TFP) is now well known at CEA/LETI and mainly used as a protection for MEMS against degradation which can occur during back end processes: TFP is strong enough to endure thermo-mechanical constraints due to grinding, handling and protects the device from water during the sawing step.
This paper presents different acoustic technologies available for innovative wireless designs. Solidly mounted BAW resonators, coupled resonator filters, Lamb wave devices and guided wave components are described. The advantages of these technologies are highlighted and their performances are compared. All these technologies can be used to design highly integrated wireless architectures.
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