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A systematic comparison between several pairs of contact materials based on an innovative methodology early developed at NOVA MEMS is hereby presented. The technique exploits a commercial nanoindenter coupled with electrical measurements, and test vehicles specially designed in order to investigate the underlying physics driving the surface-related failure modes. The study provides a comprehensive...
This paper presents a novel mechanical design applied to RF MEMS miniature capacitors. The main idea is to take benefit of superior structural material properties in order to enhance both switching speeds and reliability of RF MEMS components. As a proof of concept, miniature micro-beams fabricated from a composite multilayer assembly have demonstrated switching time lower than 50 ns. To our knowledge,...
This paper presents a novel mechanical design been applied to RF MEMS miniature capacitors. The main idea is to take benefit of superior structural material properties in order to enhance both switching speeds and reliability of RF MEMS components. As a proof of concept, miniature micro-beams fabricated from a composite multilayer assembly have demonstrated switching time lower than 50 ns. To our...
The key objectives of the SMARTIS (SMART thin film on alumina Substrate) project are presented in this paper. A focus is made on the design of the DPDT switches and on the optimization of the elementary building blocks necessary for the development of a Ka band switch matrix on Printed Circuit Board.
From several years, NOVA MEMS has developed a new set-up for the characterization of contact materials used in micro- switches. Comparisons between several pairs of contact materials have been done with this methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate the underlying physics that drives the surface-related failure...
The use of MEMS is becoming more common in consumer products such as game consoles. But for high reliability domains such as space, there is still a long path. Consequently, the support for process and failure analysis of MEMS devices requires adapted analysis techniques to face growing complexity, reliability and manufacturability challenges. There are already several analysis techniques for micro-electronics...
This paper demonstrates the efficiency of a new methodology using a commercial nanoindenter coupling with electrical measurement on test vehicles specially designed to investigate the micro contact reliability. This study examines the response of gold contacts with 5 mum2 square bumps under various levels of current flowing through contact asperities. Contact temperature rising is observed leading...
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