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This paper describes design and simulation of five degrees of freedom (5-DOF) Micro-Electro-Mechanical systems (MEMS) based tactile force sensor. Tactile sensing involves with measuring physical parameters such as force, temperature, etc. with the aid of physical touch. Over the past decades tactile sensors are gaining popularity over non-contact sensors in biomedical and robotic applications. Proposed...
We investigated the size and mode dependencies of the resonance frequencies and quality factors of PMMA (polymethyl methacrylate) and PC (polycarbonate) cantilevers under atmospheric pressure in order to obtain fundamental data for polymer-based VOC (volatile organic compound) sensors. PMMA cantilevers and PC cantilevers are fabricated by hot embossing, bonding, and polishing techniques. Variations...
This paper presents for the first time the design, fabrication and characterization of an ultra miniaturized novel 3-axis accelerometer with nanoscale piezoresistive sensing elements and read out circuits. It was developed using MEMS/NEMS machining and fabrication techniques. This sensor consists of a new sub-millimeter structure with seismic mass and combined cross-beam and surrounding beams. It...
This paper presents a novel approach for considerably enhancing the sensitivity of piezoresistive microcantilever-type acceleration sensors. The design, fabrication and characterization of an ultra miniature single crystal micro acceleration sensor with Nanometer Stress Concentration Region (NSCR) on piezoresistors utilizing bulk micromachining techniques and Focus Iron Beam tool (FIB) have been discussed...
This paper presents comprehensive improvements of micro motion transmission systems (MTS), which driven by electrostatic comb-drive actuators through ratchet mechanism to move micro objects unidirectionally in straight, curved and rotational paths. The first MTS is the tangential driving MTS, in which the driven objects are moved by tangential force. A rotational gearing MTS and micro conveyance system...
We present a multicolor total internal reflection (TIR)-based chip capable of generating up to four overlapping evanescent fields for highly-sensitive multifluorescence detection and imaging. The monolithic chip was fabricated using Si bulk micromachining and PDMS casting. Our proposed method integrates all miniaturized components, including prism, cylindrical microlenses, fiber stopper and alignment...
This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel proposed...
This paper reports the fabrication of a PMMA torsional micromirror device using hot embossing and ultra-precision machining. The mirror is operated based on electrostatic vertical comb-drive actuators. The fabrication process is described as followings. First, two-stepped silicon mold is fabricated from silicon wafer by photolithography and ICP-RIE. Next, the micromirror device structures are formed...
This paper presents the design optimization of high performance three-degree of freedom silicon accelerometer. The purpose of this optimization is to achieve the high sensitivity and high resolution. The optimization has been performed based on considerations of junction depth, the doping concentration of the piezoresistor, the temperature coefficient sensitivity, the noise, and the power consumption...
This paper presents the development of a dual axis convective microaccelerometer, whose working principle is based on the convective heat transfer and thermo-resistive effect of lightly-doped silicon. Different with developed convective accelerometer, the sensor utilizes novel structures of the sensing element which can reduce at least 93% of thermal-induced stress. By using numerical method, the...
In this paper, we present a novel structure of the sensing element or thermistor for the gas gyroscope. The thermistor is heated by a heater core, which is power -supplied independently. This design allows low voltage on the thermistor so that the noise on output voltage is reduced. Both heater and thermistor are optimized in order to reduce the thermal induced stress which occurred in the old thermistors...
We report a design and fabrication of micro conveyer system (MCS) based on electrostatic comb-drive actuators using SOI wafer. This MCS consists of linear comb actuator, rotational comb actuator, micro containers, and ratchet mechanism. Micro containers, used for carrying micro and nano samples such as protein, cells, are moved by comb-actuators through ratchet teeth. Each MCS, which has dimension...
This paper presents the optimization of the sensing element and characterizations of the dual axis gas gyroscope. Six different design of the sensing element were simulated to obtain higher sensitivity with lower power consumption. The influence of the arms structure to the thermal distribution along the thermistor was clarified. The working principle and the cross-sensitivity of the gas gyroscope...
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