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In this paper, we report the numerical and experimental study of a valveless microblower actuated by a lead zirconate titanate (PZT) diaphragm. The blower is numerically studied using the open source software OpenFOAM for the first time. As part of the study, we further developed a lumped model to describe the response of the blower to the applied frequency on the diaphragm. The model parameters were...
This paper presents for the first time the design, fabrication and characterization of an ultra miniaturized novel 3-axis accelerometer with nanoscale piezoresistive sensing elements and read out circuits. It was developed using MEMS/NEMS machining and fabrication techniques. This sensor consists of a new sub-millimeter structure with seismic mass and combined cross-beam and surrounding beams. It...
A gas-jet micro pump with novel cross-junction channel has been designed and fabricated using a Si micromachining process. The valveless micro pump is composed of a piezoelectric lead zirconate titanate (PZT) diaphragm actuator and fluidic network. The design of the valveless pump focuses on a cross-junction formed by the neck of the pump chamber and one outlet and two opposite inlet channels. The...
This paper proposes a new valve-less pump with cross-junction channels and integrated hotwires. The pump was actuated by PZT diaphragm to create a gas jet flow for fluidic application. The design and simulation are based on transient fluidic analysis with experimental result of PZT diaphragm so that features of micropump is predicted with high reliability. Two designs of the pumps with different nozzles...
This paper presents a novel approach for considerably enhancing the sensitivity of piezoresistive microcantilever-type acceleration sensors. The design, fabrication and characterization of an ultra miniature single crystal micro acceleration sensor with Nanometer Stress Concentration Region (NSCR) on piezoresistors utilizing bulk micromachining techniques and Focus Iron Beam tool (FIB) have been discussed...
This paper reports the design, simulation and fabrication of a MEMS fluidic inertial sensor, which integrates three-axis gyroscope and dual-axis accelerometer so that the device can independently detect three components of angular rate and two components of linear acceleration. The gyroscope utilizes jet flow directly created from an integrated micro pump. This simplifies packaging process while maintaining...
This paper presents the modeling and simulation of new structure for solid-state three degrees of freedom (3-DOF) micro accelerometer utilizing piezoresistive effect in single crystal Si. The proposed sensor can detect three components of linear acceleration simultaneously. The sensing structure consists of combined cross-beam and surrounding beams and seismic mass. Therefore, this novel proposed...
This paper presents design and numerically study performance of a valveless micropump. The micropump consists of two inlet channels, a pump chamber, and an outlet channel. These components are connected through a specific throat on one planar layer. A side of the pump chamber is enclosed by a vibrating plate which deforms volume of the pump chamber with time, therefore excites fluid from the inlet...
This paper presents the development of a dual axis convective microaccelerometer, whose working principle is based on the convective heat transfer and thermo-resistive effect of lightly-doped silicon. Different with developed convective accelerometer, the sensor utilizes novel structures of the sensing element which can reduce at least 93% of thermal-induced stress. By using numerical method, the...
In this paper, we present a novel structure of the sensing element or thermistor for the gas gyroscope. The thermistor is heated by a heater core, which is power -supplied independently. This design allows low voltage on the thermistor so that the noise on output voltage is reduced. Both heater and thermistor are optimized in order to reduce the thermal induced stress which occurred in the old thermistors...
This paper presents the optimization of the sensing element and characterizations of the dual axis gas gyroscope. Six different design of the sensing element were simulated to obtain higher sensitivity with lower power consumption. The influence of the arms structure to the thermal distribution along the thermistor was clarified. The working principle and the cross-sensitivity of the gas gyroscope...
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