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This paper reports a 80nm air gap double-ended tuning fork (DETF) resonator partially filled with 20nm of HfO2. The device operates at 10.7 MHz with a quality Q-factor of 7930 and a motional resistance, Rm, x18 better than for the measured counterparts in air-gaps. An enhancement of the S21 transmission signal of 6dB in addition to the reduction of the Rm have been achieved thanks to the improvement...
We demonstrate and review the unique fine-pitch high-aspect ratio tungsten-filled through-silicon vias (W-TSVs) technology developed by Fraunhofer EMFT in high-resitivity silicon substrates. The proposed process flow is fully compatible with both CMOS and MEMS technology, allowing 3D heterogeneous integration of highperformance, low power, compact tunable RF front-ends. We have assessed the figures...
A novel fabrication process for the integration of Field Effect Transistors in electrostatically actuated bulk acoustic resonators is demonstrated. ALD-deposited HfO2 is used as a high-k dielectric for the FET and as an etch-stop layer during the release of the resonator structure as well, enabling the creation of sub-100 nm air-gap resonators with FET amplification enhancement.
High frequency wine-glass mode bulk MEMS resonators actuated by means of capacitive transduction have been fabricated by using solid-gaps based on polyvinylidenefluoride-trifluoroethylene (PVDF-TrFE). The fabrication process flow of patterned PVDF-TrFE gaps applied in RF MEMS is presented for the first time. Measurements of the polarization of the material and the frequency and voltage dependence...
High-density wireless intracranial neural recording is a promising technology enabling the autonomous diagnosis and therapy of brain diseases. Increasing the number of recording channels is accompanied by the increased amount of data resulting in an unacceptable transmission power. A comprehensive study of possible compressed sensing methods in the context of neural signals has been done, and the...
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