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This paper addresses the dynamic analysis of a thin ring, which is the prototype structure for the many variants of ring and disk resonators. First, a derivation of the coriolis coupling between pairs of degenerate ring modes is provided for a rotating uniform thin ring. Next, boundary conditions are determined for the case of a uniform thin ring perturbed by point masses. Finally, perturbation solutions...
A technique which retains wafer-scale processing and packaging compatibility is described for customizing the dynamics of individual silicon resonators. The approach uses laser ablation of a protective conformal layer (parylene) to expose silicon in regions that are targeted for mass removal by subsequent DRIE. The technique is demonstrated on a planar axisymmetric resonator design whereby the frequency...
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