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In this paper, the mechanical reliability of WC–Co cemented carbide nanowires (NWs) is described. By using focused ion beam (FIB) technique, the NWs are fabricated from the bulk. Specially-developed microelectromechanical systems (MEMS) based tensile testing device is used to directly measure the fracture strength. The volume and Co area fraction of the NWs are adopted to discuss the NWs’ size effect...
We discuss the possibility of WC-Co cemented carbide as structural material in MEMS. The cemented carbide is typically used as material for working tool because it has superior characteristics, such as very high Young's modulus, excellent rigidity, good chemical inertness, and good thermal stability. These are also attractive for mechanical elements in MEMS. We investigate the influences of specimen...
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