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A thermally actuated non-cantilever-beam microelectromechanical viscosity sensor is presented. The proposed device is based on thermally induced vibrations of a simple silicon diaphragm and its damping due to the surrounding fluid. This vibration viscometer device utilizes thermal actuation through an in situ resistive heater and piezoresistive sensing, both of which utilize CMOS compatible materials...
This paper describes the design of a silicon chip that integrates multiple sensors together to monitor a variety of fluid quality parameters. The MEMS universal fluid quality interrogation sensor (MUFINS) eliminates the need to design a new chip for every fluid that requires quality control. The MUFINS chip is capable of measuring temperature, viscosity, liquid level, humidity, conductivity, pH, chlorine,...
This paper presents a simple means that utilizes surface tension gradient to cause droplet deformation, and to tilt micro-objects. Thermocapillary or Marangoni effect, and contact angle hysteresis are employed to control the droplet shape and position. The device consists of a microplate placed onto a microdroplet, and can produce a 6.5deg tilting angle when actuated at 30 V. It shows the potential...
A non-cantilever-beam micro-electro-mechanical (MEMS) based viscosity sensor is proposed. This novel vibration viscometer device utilizes thermal actuation and piezoresistive sensing. As the actuation bias is kept constant, viscosity changes can be correlated to changes in the oscillation amplitude. This proposed solution is CMOS compatible, inexpensive and reliable. This paper investigates the vertical...
This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for pressure sensors, flow sensors, micro-pumps, and micro- fluidic packaging in...
This paper reports the results for various microelectromechanical systems, devices and structures fabricated using bulk and surface micromachined processes. These microelectromechanical systems (MEMS) are designed and fabricated at the Semiconductor Micro-Fabrication Facility Laboratory at Rochester Institute of Technology. The microactuators and sensors are designed and fabricated for proof-of-concept...
In this paper, design, fabrication and evaluation of an electromagnetic MEMS micropump actuator are reported. Based on MEMS technology, the proposed micropump actuator is designed and fabricated using integrated surface and bulk micromachining at the Microfabrication Facility at the Rochester Institute of Technology. A thin silicon diaphragm with a planar spiral coil ensures the desired degree of...
This paper describes a simple, reliable; bulk micro- machined, micro-electro-mechanical system (MEMS) process flow for the fabrication of a wide variety of devices which has been implemented within the Microelectronic Engineering Department at the Rochester Institute of Technology. The fabrication and testing results for thermopiles, pressure sensors, micro-speakers, micro- pumps, accelerometers and...
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