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The temperature uniformity of thin film process is an important issue for susceptor in high temperature vacuum system. When the temperature of process is extremely high the uniformity is not only difficult to control, but also hard to maintain. In order to raise the temperature utilization at high temperature which is higher than 1300°C, the heating baffle is introduced for this purpose. As the result,...
This research focuses on the adaptive control for a high temperature heat source. The significant characteristic of adaptive control is self-regulation. The adaptive control is very important in a MOCVD process since different parameter values to control temperature in each temperature step are required. Simulations and experiments are performed to verify the feasibility of the proposed control scheme...
Numerical analysis provides a way to simulate a high temperature system so that a design of heat source can be cost-effective. This research is in design of two-zone heater for a MOCVD vacuum rector. It makes the temperature deviation on wafer reduced to be ±2% from the 10% in single-zone heater. By the design of such a heat source, the temperature uniformity can be improved and applied to the practical...
Semiconductor equipment usually can be divided into five sub-system modules, (a) heating system, (b) exhausting system, (c) injecting system, (d) power control and (e) vacuum chamber. Metal organic chemical vapor deposition (MOCVD) process is the key process to deposit epitaxy thin film, and the uniformity is determined by the distribution of susceptor temperature. This research focuses on the development...
A MOCVD process requires not only high heating efficiency, but also good temperature uniformity on susceptor surface. The most common material of susceptor is graphite, but the heating lifetime is very short. Instead, this work uses the SiC as susceptor material. It enhances both the lifetime and thermal conductivity. In the meantime, we also change the shape and structure of susceptor to improve...
Previous studies introduced novel multiple piezoelectric-magnetic fans (“MPMF”) which can improve its thermal performance effectively with only one piezoelectric actuator. Moreover, the T-shaped fan design also can increase sweep area of fan to drive more air and improve its thermal performance. This study focuses on investigating the effect of fan pitch (P) and gap (G) between fan tip and heat sink...
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