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This paper demonstrates a novel electronic nose (e-nose) system for volatile organic compounds (VOCs) detections which is composed of three high-Q piezotransduced single-crystal silicon bulk acoustic resonators (PSBARs) and functionalized with different self-assembled monolayers (SAMs). The different sensitivities of the PSBARs to VOCs are utilized to constitute unique identification codes for IPA,...
We demonstrated the diaphragm type PZT oscillator performance through simulation experiments. To achieve the desired frequency, firstly, the size of a diaphragm and a thickness of PZT and Si layers are optimized. Then, we select three different PZT/Si models. Finally, we analyze the models transmission efficiency, receiving sensitivity (piezoelectric voltage / electric charge) and frequency bandwidth...
Many critical infrastructures are composed of multiple systems of components which are correlated so that disruptions to one may propagate to others. We consider such infrastructures with correlations characterized in two ways: (i) an aggregate failure correlation function specifies the conditional failure probability of the infrastructure given the failure of an individual system, and (ii) a pairwise...
This work addresses on the fabrication of ion-sensitive field-effect transistors with the multiple Ω-shape nano-channels. The Ω-shaped channels with the width/space about 1∶1, 200/200 nm, were fabricated by the thermal nanoimprint lithography and the anisotropic/isotropic dry etching processes. The sensing properties of proposed ISFETs were studied and compared with the conventional single channel...
In this paper, thin film diamond resonators on Si wafer for high sensitivity force sensing have been developed. Patterned diamond structures have been formed on Ir/YSZ/Si substrate. The completed diamond resonator of cantilever shows a resonance frequency of 51.0 kHz with a quality factor of 14911. The both clamped resonator shows the force sensitivity of 3.36×10−13 N/Hz0.5 at 229.3 kHz with 23500...
The Pd/SnO2/Al2O3/CuO/Ag/SnO2/Al2O3/CuO/p-Si/Al tandem p-i-n diodes with nanorod structure and addition of silver interconnecting metal layer were studied. The added interconnecting metal layer influences the material characteristics and leads the developed device to have a high relative sensitivity ratio of ∼2185% to 3000 ppm CO2 ambient gas. The response time of 20 sec is also fast. Thus, it has...
Residual stress of sol-gel derived lead-zirconatetitanate (PZT) films was investigated under modified preparation conditions to realize buckled diaphragm structures for highly sensitive ultrasonic microsensors. As the modifications of the sol-gel process, pyrolysis temperature was varied from 250°C to 400°C, and the timing of crystallization annealing was modified in the multi-coating steps; with...
In critically ill patients suffering from hyperglycemia, it has been recently shown that mortality and morbidity can be reduced by keeping blood glucose within the range of 80–110 mg/dL. However, maintaining glycemia within such range is difficult due to the time variability in insulin sensitivity in critically ill patients. In this paper, we propose a novel glycometabolism model of critically ill...
MOSFET type photodetectors, also known as phototransistors, have the advantages of not only high photo sensitivity and responsivity, but also integrability into conventional CMOS chips. In this work, flexible phototransistors with a back gate configuration based on transferrable single crystalline Si nanomembrane (Si NM) have been demonstrated [1–3]. The schematic illustration of the device fabrication...
A novel all-silicon thermal independent Mach-Zehnder interferometer consisting of two multimode waveguide arms having equal lengths and widths but transmitting different modes is proposed and experimentally demonstrated. The interferometer has a temperature sensitivity smaller than 8pm/°C in a wavelength range of 18nm.
This paper proposes a new approach for finding the minimum number of post-contingency corrections to relieve overload. The security-constrained optimal power flow (SCOPF) problem with AC power flow constraints can be formulated as mixed integer nonlinear programming (MINLP), which is an NP-hard problem. A two-stage approach—screening and detailed analysis—is utilized to solve the non-convex MINLP...
The surface electromyography signal (sEMG) provides important information for the assessment of muscle function during gait. The intervals of SEMG activity in each muscle and the relationship between them are often used for evaluation. Intervals are often determined by a simple threshold method. In this paper the method was evaluated in terms of specificity and sensitivity in detecting activation...
This paper discusses the influence of top-electrode (TE) and bottom-electrode (BE) materials on the resistive transition of sputter-deposited TiO2 films. The electronic characteristics of the TiO2 films are elucidated from the physical mechanism of resistive transition.
In this paper, the robust observer problem is tackled for mode identification of hybrid dynamical system with variable structures. The main objective is to design an observer that, in the presence of faults and disturbances, the detection time of the active mode is minimized. Two observed-based method are discussed herein: The Linear matrix inequalities approach (LMI) and the pole placement method...
As dimensions shrink with each successive semiconductor technology node, the critical size of defects that can impact yield also shrinks. Monitoring the health of process equipment rigorously and regularly for key sources of contamination must be performed. Comparison of the critical feature size per technology node with the typical defectivity size used for process control shows a widening disparity...
First anti-symmetric (Ai) mode Lamb wave propagating in a LiTaO3 thin plate at an Euler angle around (0°, 45°, 0°) has a high velocity. Both phase velocity and electromechanical coupling factor have been evaluated at different propagation angles (0°, 45°, ψ°). A1 mode Lamb wave at (0°, 45°, 0°) offers the highest velocity and largest electromechanical coupling factor, thus proving suitable for high...
In this paper, the effect of crystalline orientation on acceleration sensitivity of silicon-based microelectromechanical resonators is investigated for the first time. In addition, the correlation between the nonlinearity of the resonators and the corresponding acceleration sensitivity is experimentally demonstrated. For this purpose, thin-film piezoelectric-on-substrate (TPOS) resonators are fabricated...
Analyzing the concentration of acetone in human breath constitutes a promising non-invasive means to diagnose the onset of diabetes, with acetone levels of at least 1.8ppm typically associated to individuals suffering from diabetes. In this paper, we report the performance of a hierarchical ZnO nanostructure gas sensor for acetone detection. The fabricated gas sensor can detect concentrations as low...
Epidermal pressure sensor that directly contacts with human skin can be used to monitor physiological signals, such as pulse, blood pressure, and heartbeat etc. Although promising stretchable substrates and electrodes were developed in the past, there is a need for a technology to produce inexpensive epidermal pressure sensor that is sensitive to a low-pressure regime and is flexible and stretchable...
In this paper, we propose a corrugated diaphragm applied to the fiber optic pressure sensor which needs a wide sensing range and a large deflection. The corrugated diaphragm can effectively improve the sensitivity of the sensor has been proved by ANSYS simulation. The stress concentration is weakened after the silicon is chamfered into corrugated diaphragm by isotropic etching process. The sensitivity...
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