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This paper presents a new method for achieving Au/aSi (amorphous Si) eutectic wafer-level bonding. The Si-Glass wafer bonding was conducted with Au layer patterned on glass wafer and amorphous Si layer on silicon wafer. The amorphous Si here was transformed from the single crystal silicon by the Argon implantation process. A novel torsional strength test structure was proposed and applied for characterization...
In this paper we investigate the properties of SWCNTs film-silicon vertical heterojunction fabricated by simple drop-casting method. The vertical heterojunction shows a good rectifying characteristic, which demonstrates a good Schottky contact, with a Schottky barrier height of 0.46eV. At high temperature, thermionic emission is the dominant transport mechanism, while tunneling begins to lead below...
Islet ultra-thin gold films are used extensively in various fields of science and technology in recent years. Their widespread use is based on the occurrence of plasmon-polaritons in these films upon irradiation with light. When exposed to light, small gold particles are polarized and electrons within them begin to oscillate together. To produce such nano-dimensional gold islands, we used various...
Fabrication of a portable high-density charged particle trap with an array of micro-Penning-Malmberg traps (microtraps) with substantially lower end barrier potentials than conventional Penning-Malmberg traps is presented [1]. The microtraps are designed for antimatter storage such as positrons. The fabrication of large length to radius aspect ratio (1000:1) microtrap arrays involved advanced techniques...
In this study, a novel glucose biosensor based on a 3D silicon nanowire array (SNA) electrode was proposed. Metal-assisted etching (MAE) method using an AgNO3 and HF mixing solution as the etchant is employed for fast etching of a silicon wafer to form the SNA electrode. A thin gold shell is then coated onto each silicon nanowire by sputtering. Potassium ferricyanide, glucose oxidase, and a Nafion...
In this paper, we demonstrate the ability of deep level doping to reduce the substrate losses in coplanar waveguides and spiral inductors. Room temperature resistivity of Au doped Czochralski-Si increases from 50Ωcm for n-type Si to 100 kΩcm for Au doped Si and temperature dependent Hall measurements show a six order increase in resistivity at lower temperatures which is entirely due to a decrease...
We design and fabricate a vertical hybrid SPP waveguide. The suitability of ultrahigh-bandwidth data transmission through the proposed waveguide by transmitting 1.8-Tbit/s (161 wavelength 11.2-Gbit/s) WDM OFDM 16-QAM is studied. The BERs of all 161 channels are less than 1e−3.
We report on an efficient room-temperature source of single photons based on single nitrogen-vacancy centers in nanodiamonds (NDs) placing on a large-area plasmonic platform formed by crystalline gold flakes covered with a thin dielectric layer. Due to the strongly confined plasmonic fields in the thin dielectric layer, the NDs show a large enhancement in the fluorescence intensity without significant...
Intense optical field strengths result from redistributed photon density of states in hybrid metal-dielectric photonic crystals and microcavity structures are probed through spectral domain and angle resolved Raman scattering studies.
The development of the MEMS microphone has been an active area of research over the past several decades. MEMS microphones have advantages such as compact size, high signal-to-noise ratio, high sensitivity, quick response, and long term stability. MEMS microphone is also compatible with the surface mount process. There are various design considerations for MEMS microphone such as less interference,...
An explicit characterization of the capacity region of the general network coding problem is one of the best known open problems in information theory. A simple set of bounds that are often used in the literature to show that certain rate tuples are infeasible are based on the graph-theoretic notion of cut. The standard cut-set bounds, however, are known to be loose in general when there are multiple...
We describe low loss microstrip transmission line with compact coplanar waveguide transitions for sub-terahertz application. The conducting transmission line is fabricated on the surface of a thin cyclic olefin copolymer dielectric layer. A vector network analyzer (VNA) has been used to obtain the transmission parameters and to validate our simulation results.
A gold/silicon Schottky-type plasmonic detector was monolithically integrated with two metal-oxide-semiconductor field-effect transistors (MOSFETs) on a silicon substrate. The output current from the detector was amplified 14000 times by using the MOSFETs.
Periodic pyramid and random nanostructure binary structures of single-crystal silicon wafer was fabricated by chemical etching method. Much lower reflectance of silicon wafer with these structures was obtained compared with that of single pyramid arrays. The morphology and reflectivity of these structures, as well as the influence on nanostructures caused by rapid thermal annealing (RTA) time and...
Controlled surface wrinkling could provide ordered and hierarchical structures in micro- and nano-meter scale. Here combined influence of out-of-plane compressive stress and in-plane substrate relief in Au/PDMS bilayer system was experimentally investigated to explore morphological evolution of surface wrinkling. Compared with single influence from out-of-plane compression or in-plane relief, the...
The quality and the reliability of the electrical interconnection have a direct impact on the performance of the MEMS/NEMS devices. In this work, reliable electric interconnection for MEMS/NEMS devices was realized by Au/a-Si (amorphous Si) eutectic reaction in the anodic wafer bonding process. In order to evaluate the qualities of the anodic bonded contact, the electrical property of the Au/a-Si...
Ubiquitous learning technologies will play a key role in smart learning cities. However, despite the hype, the degree of adoption of ubiquitous learning systems, even in controlled academic environments, has perhaps not reached its full potential. Consequently, there is a need to understand the adoption behavior of key stakeholders. This paper presents a first step in this direction by asking researchers...
The conductivity and low frequency noise of n-and p-type Si nanowire arrays are measured in humid and dry environments. It was found that the conductivity increases for both n- and p-type arrays in a humid environment. The low frequency noise characteristics indicate a change in the carrier transport process from noise governed by trapping processes at the interface in a humid environment to noise...
A simplified curved structure of vibratory cantilevers has been designed and fabricated for precision improvement of triaxial tactile sensing. While the previously developed cantilever had two vibratory parts, the new one has one vibratory part and a compact hook with a small curvature radius. In tactile sensing simulation, the new structure has been expected to reduce the tactile estimation error...
Recently, three dimensional integration circuits technology has received much attention because of the demands of gradually increasing functionality and performance in microelectronic packaging for different types of electronic devices. For 3D chip stacking, high density interconnections are required in high-performance electronic products. Though the bumping process used could be either electroplating...
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