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Despite the increasing use of ICs at very high temperatures (>150°C) in automotive and industrial applications, sensing such temperatures is still mostly done with discrete thermocouples or thermistors. This is because conventional integrated temperature sensors are based on BJTs, which have a strongly process-, stress — and temperature-dependent saturation current (Is). Together with other leakage...
Today's wireless sensor nodes can be easily attached to mobile platforms such as robots, cars and cell phones enabling pervasive sensing of physical fields (say of temperature, vibrations, air quality and chemicals). We address the sensor arrangement problem, i.e. when and where sensors should take samples to obtain a good estimate of a field using mobile sensors. In particular, we focus on incidentally...
We demonstrate the first active stabilization of a microring-based device within a thermally volatile environment. The proposed design is CMOS integratable and leverages low-speed power monitoring and a feedback loop circuit for dynamic thermal correction.
Predictive-control methods have been recently employed for demand-response control of building and district-level HVAC systems. Such approaches rely on models and parameter estimates to meet comfort constraints and to achieve the theoretical system-efficiency gains. In this paper we present a methodology that establishes achievable targets for control-model parameter estimation errors based on closed-loop...
This paper presents a fully integrated Hall sensor microsystem with a current-mode output. The system operates in open-loop and includes a Hall sensor with internal biasing, a fully differential front-end, a preamplifier chain and a voltage-to-current converter (V-I). The effects of the V-I block on the sensitivity drift of the system are analyzed and a current biasing of the Hall cells is proposed...
Plug-and-play functionality in sensor networks is becoming inevitable to make network configuration and reconfiguration flexible and cost effective. The IEEE 1451 standard brings forward the concept of Transducer Electronic Data Sheet (TEDS), which is a memory device attached to the transducer, storing detailed information to configure the corresponding transducer. In this paper we share our experiences...
This paper presents the results of FEM (Finite Element Modeling) analysis of Integrated Thermal Flow Sensor intended to be used in a Spirometer to measure air flow generated by human's respiratory. Using calculated air flow, the sensor output is used to predict the air flow pattern characterized by two physical parameters, known as FVC and FEV. It is shown that different geometrical design, namely...
Shallow-ridge silicon ring resonator sensors designed for high-sensitivity TM mode operation are fabricated on silicon-on-insulator (SOI), demonstrating complete cancellation of thermo-optic effects for aqueous solution operation near 300K.
A high-mode resonant silicon cantilever sensor is developed for detection of airborne nanoparticles (NPs) by monitoring the change in resonant frequency induced by an additional trapped NPs mass. A piezoresistive bridge is integrated in the cantilever for signal sensing. An electrostatic method is employed to trap the NPs on the cantilever surface. The experimental results indicate that the cantilever...
This work presents a technique for temperature compensation of Silicon Piezoresistive Pressure Sensors (PPSs) based on a Proportional to Absolute Temperature (PTAT) Bias-Current circuit (IPTAT). This technique is applied on the Multi-Stage Current-Mode Piezoresistive Pressure Sensor based on a 3-Terminal Pressure Sensor (3-TPS) that recently has been being studied as an alternative to the conventional...
A fabricated 50 Gb/s silicon-on-insulator (SOI) Mach-Zehnder demodulator exhibits over 90 % improvement in thermal stability with 0.05 nm/°C of its spectral profile compared to 0.9 nm/°C for a non-compensated demodulators.
This paper presents design and simulation on optimizing a sensing microgripper structure based on silicon-polymer electrothermal actuators and piezoresistive force-sensing cantilever beams. The simulation is to utilize the structure and organize heaters for lower temperature at gripper's jaw, while not affecting the displacement. By reducing the heat diffusion into the base and the redistribution...
Several Hall sensor configurations have been integrated in CMOS technology and analyzed in terms of offset at room temperature and offset drift. We looked for the best geometry that would minimize the offset and its drift. The targeted specification was ±30 µT for offset at room temperature and ±0.3 µT/°C for the drift. The measurement setup developed allows a clean, reliable and fast analysis of...
Temperature uniformity on a micro-hotplate is important for gas sensor sensitivity, linearity, and resolution. There are several ways to create a uniform temperature distribution on a micro-hotplate. In this paper, the modification of microheater geometry is the method used. Four different heater geometries are simulated using ConvetorWare software to determine which geometry can give the most uniform...
The ATLAS silicon tracker community foresees an upgrade from the present octafluoropropane (C3F8) evaporative cooling fluid — to a composite fluid with a probable 10–20% admixture of hexafluoroethane (C2F6). Such a fluid will allow a lower evaporation temperature and will afford the tracker silicon substrates a better safety margin against leakage current-induced thermal runaway caused by cumulative...
We have studied the effect of substrate material related to thermal mismatch for silicon carbide (SiC) diaphragm-based capacitive pressure sensors. Two sets of devices, with identical dimensions and fabrication processes were made on poly-SiC and Si substrates. Designed for a maximum pressure of 4.83 MPa (700 psi), these devices were operated in small-deflection mode and tested at room temperature...
This paper presents a silicon probe designed with three polysilicon resistance temperature detectors (RTDs) for heart temperature sensing in open-heart surgery. Via an integrated SU-8/Cu flexible ribbon cable for signal transmission to the instrument reader outside human body, the probe with a 40° tip angle can provide ∼0.9°C sensing accuracy and sustain a 4N buckling load large enough for the probe...
In this paper, a silicon resonant cantilever sensor is used for monitoring airborne nanoparticles (NPs) by detecting the resonant frequency shift that is directly induced by an additional NPs mass deposited on it. A piezoelectric stack actuator and a self-sensing technique using a piezoresistive strain gauge are involved in the sensor system in order to actuate and detect the oscillation of cantilever...
In this paper the application of miniaturized gas chromatography for analysis of gas mixtures containing hydrocarbons with one and two carbon atoms is presented. The focus is on the quantitative measurement of ethylene gas which is important for post-harvest applications in e.g. fruit logistics. A miniaturized gas chromatographic column packed with Carboxen 1000 was combined with a SnO2 gas detector...
This work presents the first thermal-diffusivity-based temperature sensor in SOI technology; it has an untrimmed inaccuracy of ±0.6°C (3π) from −70°C up to 170°C and uses up to 7x less power than prior art. The sensor uses an electrothermal filter (ETF) to measure the thermal diffusivity of silicon, D, which has a well-defined 1/T1.8 temperature dependence. The ETF's output is digitized by a phase-domain...
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