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We demonstrate that Dirac dispersion cones in photonic hypercrystals originate from an optical topological transition. The resulting singularity in the photonic density of states has a strong effect on the emissivity of the hypercrystal.
We report on the design and experimental demonstration of high-Q Si resonators with Q ∼ 106, a fundamental figure of merit of the phase coherence of hybrid Si/III-V semiconductor lasers.
We demonstrate low-noise mid-infrared frequency comb generation using a silicon microresonator. Using an integrated PIN-diode detector, we show a transition to a low RF-amplitude-noise state consistent with demonstrations of phase-locking in other microresonator platforms.
The total DDR on-die AC power delivery noise can be decomposed into high pass filtered (HPF) Vppa and low pass filtered (LPF) Vppb. PI-SI co-simulation reveals that Vppa impacts timing (eye width) and Vppb impacts signal voltage amplitude (eye height), and they need to be budgeted in different manner. Consequently the Power Delivery Network (PDN) is optimized with significant Cpkg and Cdie reduction...
Capacitance is very important in High Speed I/O power integrity network design. There are different form of capacitors being used on the High Speed I/O Power Integrity Network to ensure the performance of the circuit. In this paper, the effectiveness of MIM capacitance and MOS capacitance is compared. MIM capacitance comes in bulk quantity but placed further away from the HSIO circuits. While MOS...
A periodic structure of nanoholes in a continuous sheet of graphene over a silicon substrate is analyzed and its application as a terahertz (THZ) polarizer is demonstrated. The effect of the hole geometry on the extinction ratio and the working frequency of the polarizer is investigated. This periodic structure is then used in a double layer structure to realize a substrate-based polarizer with a...
In this paper, we proposed a graphene-silicon diode loaded patch antenna, which is fabricated on silicon wafer. The structure of patch antenna is perfectly compatible with the diode process. Its equivalent circuit and frequency-tunable characteristics are analyzed with an equivalent circuit model. The result is verified by 3-D full-wave simulation. This patch antenna, which is directly printed on...
Processes that define the cantilever sensor from the front side of the wafer are designed to release the stress of the buried oxide layer and top silicon layer. This approach can be applied to enhance the performance of all the cantilever-based sensors. Then, a novel cantilever array sensor was microfabricated for precise bio-marker detection.
Vibrational energy harvesters (VEH) are increasingly becoming the favourite approach towards making self sustained low power systems. However, obtaining frequencies close to those of ambient vibrations has been a challenge. In the current work we have proposed a novel design of the piezoelectric-VEH (P-VEH) consisting of a micro-machined thick silicon proof mass suspended with quad-beams carved out...
Polystyrene was used to fabricate gradient index structure for terahertz antireflection via a hot-embossing process. Compared with a single non-structured antireflective layer, the gradient index structure increases transmittance by 20% and has broader enhanced bandwidth.
A novel variable optical attenuator (VOA) based on two coupled rings in silicon-on-insulator (SOI) waveguides has been proposed and experimentally demonstrated, from which an attenuation varying from 0 dB to 35 dB can be obtained.
We describe the design and fabrication of a resonant absolute MEMS pressure sensor using a semi-custom fabrication process. We selected a double anchored Double-Ended Tuning Fork (DETF) resonator for this work. The pressure sensor design is based on fabricating two resonant structures side by side using MEMS Integrated Design for Inertial Sensors (MIDIS) process, a commercial pure-play MEMS process...
An electrically tunable band-pass filter based on engineered substrate with patterned Permalloy (Py) thin film has been designed and characterized. The band-pass filter is designed with metamaterial resonators to achive a compact size; the designed filter is fabricated on a multi-layered engineered substrate which composes a layer of liquid crystal polymer, a layer of patterned Py thin film, and silicon...
A 4.6–5.35GHz transceiver with active self-interference cancelation is reported. The active cancelation circuit cancels up to 38dB of TX leakage at 10kHz offset from the RX signal. It increases the interference P1dB from −25dBm to −8dBm, and RX gain by 15dB. When the transceiver is utilized in a magnetic resonance spectroscopy system, the SNR improves by 15dB. Furthermore, in addition to the traditional...
We report quartz level temperature stability of piezoelectrically driven silicon MEMS resonators. Frequency stability of better than ±10 ppm is measured for 23 MHz extensional mode resonators over a temperature range of T = −40 … + 85°C. The temperature compensation mechanism is entirely passive, relying on the tailored elastic properties of heavily doped silicon with a doping level of n > 1020...
We experimentally demonstrate the use of simple MEMS microcantilevers as an efficient way to achieve dynamic manipulation of terahertz waves. An array of subwavelength sized microcantilevers acts as metamaterial, which can be electrostatically tuned to provide active control of light-matter interaction. The proposed metamaterial shows tuning range of 0.3 THz, which is further improved to 0.36 THz,...
We report the first experimental demonstration of a heterodyne self-oscillator operating alternatively on the first and second flexural mode of a silicon NEMS resonator. This architecture features a downmixing scheme where the NEMS motion-induced piezoresitive signal at 25 MHz and 70 Mhz is shifted down to few tens of kHz thus reducing the bandwidth constraint on the electronics. In closed loop operation,...
In this paper analytical modeling of Lorentz-force transduced micromechanical resonator is presented at the transfer function level. Such resonators are useful for low-frequency filtering applications in the field of biomedical and RF communication area. The present work focuses on the utilization of Lorentz force actuation with piezoresistive sensing for the realization of vertical flexural mode...
This paper gives a detail description of a silicon vibration beam accelerometer which was fabricated by SOI technology and encapsulated in a wafer level vacuum package. The wafer level package gives advantage of small size and low cost, but also produce additional residual stresses that increased the temperature coefficient of the vibration beams. To solve this problem, the sensing structure was redesigned...
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