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The composite structure of silicon tips and vertical aligned carbon nanotubes (CNTs) was prepared using plasma enhanced hot filament chemical vapor deposition (PE-HFCVD) method on the silicon wafer, and Au/Ni film coated on the substrate was considered as a catalyst. High proportion hydrogen of 96% volume percentage and high total pressure are used during preparing process, and the pure CNTs, pure...
A high efficiency and well-controlled method to synthesize multi-wall carbon nanotube (MW-CNT) forests is reported. The three-temperature segment chemical vapor deposition (TTS CVD) system contains three individually operated heaters distributed along one quartz tube in CVD that provides controllable temperature gradient in quartz tube. The developed temperature gradient in TTS CVD significantly elongates...
In this paper, novel and simple fabrication method of CNT field emitter by means of direct growth of CNT onto tungsten tip by CVD was developed. This method enables a fabrication of a high-quality CNT field emitter with simpler procedures than conventional methods. Aluminum (Al), nickel (Ni) and molybdenum (Mo) films were sequentially deposited onto a W tip with tip radius of ~ 0.1 micrometer. Ni...
Carbon nanotubes have been grown on a polished copper substrate by thermal chemical vapor deposition (CVD). Nickel film is deposited on the metallic substrate as catalyst and the reactant gas is acetylene. Efficient field emission of CNTs emitters (Emission area is about 3.14 mm2) is observed from I-V and F-N curves. Stable emission current with the density of more than 20mA was got at the electric...
Carbon nanotubes (CNTs) have been proposed for applications in microelectronic applications, especially for electrical interconnects and nanodevices, due to their excellent electrical, thermal and mechanical properties. Usually, the CNTs produced by arcing, laser ablation or chemical vapor deposition (CVD) are inevitably close-ended. Due to the weak coupling of the individual walls and close ends,...
A top-gated carbon nanotube (CNT) field-effect transistor (FET) was fabricated on a quartz substrate using a single nanotube grown by CVD and a sputtered SixNy gate dielectric. Measurements of the mixing products produced by two closely spaced microwave input signals applied to the gate of the FET circumvented the problems associated with measuring high impedance RF devices in 50 Omega systems. The...
High density well aligned vertical CNT arrays were synthesized by thermal chemical vapor deposition (CVD) method on 1 inch by 1 inch Si substrates with sputtered Ti and Si layers. They were used as a new kind of thermal interface material (TIM) for the thermal management of microelectronic packages and high brightness light emitting diode (HB-LED) packages. The thermal resistance of the CNT-array-TIM...
Due to the surface smoothness of micromachined structures, strong adhesion forces between these fabricated structures and the substrate can be developed. The major adhesion mechanisms include capillary forces, hydrogen bonding, electrostatic forces and van der Waals forces. Once contact is made, the magnitude of these forces is in some cases sufficient to deform and pin these structures to the substrate,...
Carbon nanotube (NT) layers grown by CVD on Ni foil demonstrated low voltage characteristics of field electron emission: the value of the field amplification coefficient beta was in the range 1000-4000. The influence of electric field (Eav), emission current (IFE ) and exposure time on the configuration of conical-layer carbon nanotubes grown by CVD on the edge of a Ni foil has been investigated....
Instead of the CVD method to form a gate oxide layer, a wet-etching method was used to form an insulating layer and isolate cathode layer from gate electrode. The wet-etching process has many advantages such as simple manufacture process, mass production and low cost. A gate triode structure was fabricated because of its simplicity in fabrication process and beam broadening. A new type of triode structure...
We used Langmuir-Blodgett films including iron atoms as a catalytic metal material for carbon nanotube (CNT) growth through chemical vapor deposition. We have found a new form of nanotube growth, which we call a giant carbon nanotube construction (GNC). The GNC seems to be self-assembled, almost as if a sock were knitted by carbon nanotubes. The GNC has thin (5 mum in diameter) and long (100 mum in...
Layers of non-directional carbon nanotubes (CNTs) are currently used as field emission (FE) cathodes. The main advantage for such cathodes is the low cost fabrication process using conventional film deposition techniques such as screen-printing or imprint. This advantage is unfortunately counter-balanced by the non-uniformity and low density of the field emission sites, a consequence of its mat-like...
For carbon nanotubes to be used for electronic application, nanotubes would need to achieve high interfacial adhesion with metal. In this paper, chemical vapor deposited carbon nanotubes have been successfully coated with nickel by electroless plating method. Ni plates were used as substrates as well as catalyst provider for the growth of carbon nanotubes. Without dispersing the grown nanotubes from...
Fabrication techniques, field emission (FE) measurements, and cold cathode applications of carbon nanotube (CNT) and carbon nanofibers (CNF) are reviewed. Among the fabrication techniques discussed are screen printing and catalytic chemical vapour deposition. FE properties of single-wall (SWNT) and multiwall nanotubes (MWNT) are studied under SEM control. Optimization of various cold cathode materials...
As IC performance increases, many technical challenges appear in the areas of power delivery, thermal management, I/O density, and thermal-mechanical reliability. To address these problems, the use of aligned carbon nanotubes (CNTs) is proposed in IC packaging as electrical interconnect and thermal interface materials. The superior electrical, thermal, and mechanical properties of CNTs promise to...
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