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2015 IEEE International Electron Devices Meeting (IEDM) > 9.2.1 - 9.2.4
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 922 - 930
2015 IEEE International Electron Devices Meeting (IEDM) > 9.2.1 - 9.2.4
Journal of Microelectromechanical Systems > 2015 > 24 > 4 > 922 - 930